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Fabrication of diffraction-encoded micro-particles using nano-imprint lithography

Fabrication of diffraction-encoded micro-particles using nano-imprint lithography
Fabrication of diffraction-encoded micro-particles using nano-imprint lithography
A nano-imprint lithography technique is described for fabrication of optically encoded microparticles (diffractive barcodes). The particles are fabricated from SU8 - a material which can be processed lithographically, and which can be used for attachment of molecular tags. The barcodes are identified by their unique diffraction patterns
1361-6439
S116-S121
Banu, Shahanara
5e1caab9-665e-4a17-b582-28a059acdf06
Birtwell, Sam
79badfd4-140d-48fe-93ba-a6e658788e96
Galitonov, Gerasim
7fae016d-c67d-431e-aa4d-0d25a3baf249
Chen, Yifang
fb868aa4-ecb4-4203-a0a8-88c2195a2bae
Zheludev, Nikolay
32fb6af7-97e4-4d11-bca6-805745e40cc6
Morgan, Hywel
54c374b6-f909-4894-9687-8420c3bf6bfe
Banu, Shahanara
5e1caab9-665e-4a17-b582-28a059acdf06
Birtwell, Sam
79badfd4-140d-48fe-93ba-a6e658788e96
Galitonov, Gerasim
7fae016d-c67d-431e-aa4d-0d25a3baf249
Chen, Yifang
fb868aa4-ecb4-4203-a0a8-88c2195a2bae
Zheludev, Nikolay
32fb6af7-97e4-4d11-bca6-805745e40cc6
Morgan, Hywel
54c374b6-f909-4894-9687-8420c3bf6bfe

Banu, Shahanara, Birtwell, Sam, Galitonov, Gerasim, Chen, Yifang, Zheludev, Nikolay and Morgan, Hywel (2007) Fabrication of diffraction-encoded micro-particles using nano-imprint lithography. Journal of Micromechanics and Microengineering, 17 (7), S116-S121. (doi:10.1088/0960-1317/17/7/S08).

Record type: Article

Abstract

A nano-imprint lithography technique is described for fabrication of optically encoded microparticles (diffractive barcodes). The particles are fabricated from SU8 - a material which can be processed lithographically, and which can be used for attachment of molecular tags. The barcodes are identified by their unique diffraction patterns

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Published date: July 2007
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 265701
URI: https://eprints.soton.ac.uk/id/eprint/265701
ISSN: 1361-6439
PURE UUID: 16eae7f1-5a17-4985-88b6-5ee0f389a2e7
ORCID for Nikolay Zheludev: ORCID iD orcid.org/0000-0002-1013-6636

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Date deposited: 09 May 2008 09:23
Last modified: 31 Jul 2019 00:52

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Contributors

Author: Shahanara Banu
Author: Sam Birtwell
Author: Gerasim Galitonov
Author: Yifang Chen
Author: Hywel Morgan

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