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Free-standing thick-film piezoelectric device

Record type: Article

A free-standing thick-film cantilever sensor structure is presented. Such devices find use in applications such as vibration detection or energy harvesting. The structure was fabricated by screen printing layers of lead zirconate titanate (PZT) between silver/palladium electrodes and co-firing the layers together with a carbon sacrificial layer (deposited underneath) in an air environment at a temperature of 850°C. The free-standing structure, of dimensions 18 mm long by 9 mm wide and thickness of 50 ?m, was found to produce electrical powers of up to 95 nW at an acceleration level of 9.81 m/s2 (1 g), when driving a 60 kOhm load resistance.

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Citation

Kok, S. L., White, N. M. and Harris, N. R. (2008) Free-standing thick-film piezoelectric device Electronics Letters, 44, (4), pp. 280-281.

More information

Published date: 2008
Organisations: EEE

Identifiers

Local EPrints ID: 265808
URI: http://eprints.soton.ac.uk/id/eprint/265808
ISSN: 0013-5194
PURE UUID: 404f6055-55f9-4941-b71b-1e391106a8e7
ORCID for N. M. White: ORCID iD orcid.org/0000-0003-1532-6452
ORCID for N. R. Harris: ORCID iD orcid.org/0000-0003-4122-2219

Catalogue record

Date deposited: 27 May 2008 17:11
Last modified: 18 Jul 2017 07:22

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Contributors

Author: S. L. Kok
Author: N. M. White ORCID iD
Author: N. R. Harris ORCID iD

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