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A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices

Record type: Article

This paper presents a novel method for the computation of force in an electrostatically operated microelectromechanical systems (MEMS) device. The approach is based on continuum design sensitivity analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micromirror, and numerical results are compared with experimental measurements on the real device.

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Citation

Li, M., Kim, D. H., Lowther, D. A. and Sykulski, J. K. (2008) A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices IEEE Transactions on Magnetics, 44, (6), pp. 1610-1613.

More information

Published date: June 2008
Keywords: Continuum design sensitivity analysis (CDSA), force calculation, microelectromechanical system (MEMS) devices
Organisations: EEE

Identifiers

Local EPrints ID: 265844
URI: http://eprints.soton.ac.uk/id/eprint/265844
ISSN: 0018-9464
PURE UUID: 4ca57ed3-1fb4-4b04-b531-77eba1c37ff9
ORCID for J. K. Sykulski: ORCID iD orcid.org/0000-0001-6392-126X

Catalogue record

Date deposited: 04 Jun 2008 13:08
Last modified: 18 Jul 2017 07:22

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Contributors

Author: M. Li
Author: D. H. Kim
Author: D. A. Lowther
Author: J. K. Sykulski ORCID iD

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