A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices


Li, M., Kim, D. H., Lowther, D. A. and Sykulski, J. K. (2008) A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices IEEE Transactions on Magnetics, 44, (6), pp. 1610-1613.

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Description/Abstract

This paper presents a novel method for the computation of force in an electrostatically operated microelectromechanical systems (MEMS) device. The approach is based on continuum design sensitivity analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micromirror, and numerical results are compared with experimental measurements on the real device.

Item Type: Article
ISSNs: 0018-9464 (print)
Keywords: Continuum design sensitivity analysis (CDSA), force calculation, microelectromechanical system (MEMS) devices
Organisations: EEE
ePrint ID: 265844
Date :
Date Event
June 2008Published
Date Deposited: 04 Jun 2008 13:08
Last Modified: 17 Apr 2017 19:12
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/265844

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