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A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices

Li, M., Kim, D. H., Lowther, D. A. and Sykulski, J. K. (2008) A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices IEEE Transactions on Magnetics, 44, (6), pp. 1610-1613.

Record type: Article


This paper presents a novel method for the computation of force in an electrostatically operated microelectromechanical systems (MEMS) device. The approach is based on continuum design sensitivity analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micromirror, and numerical results are compared with experimental measurements on the real device.

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Published date: June 2008
Keywords: Continuum design sensitivity analysis (CDSA), force calculation, microelectromechanical system (MEMS) devices
Organisations: EEE


Local EPrints ID: 265844
ISSN: 0018-9464
PURE UUID: 4ca57ed3-1fb4-4b04-b531-77eba1c37ff9
ORCID for J. K. Sykulski: ORCID iD

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Date deposited: 04 Jun 2008 13:08
Last modified: 18 Jul 2017 07:22

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Author: M. Li
Author: D. H. Kim
Author: D. A. Lowther
Author: J. K. Sykulski ORCID iD

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