A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices
A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices
This paper presents a novel method for the computation of force in an electrostatically operated microelectromechanical systems (MEMS) device. The approach is based on continuum design sensitivity analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micromirror, and numerical results are compared with experimental measurements on the real device.
Continuum design sensitivity analysis (CDSA), force calculation, microelectromechanical system (MEMS) devices
1610-1613
Li, M.
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Kim, D. H.
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Lowther, D. A.
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Sykulski, J. K.
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June 2008
Li, M.
72430469-7491-49ea-88a0-9f8aed0abcb7
Kim, D. H.
0e9add9d-72de-4faf-bad4-bcb212d8fd29
Lowther, D. A.
a116f9f4-3d12-4985-b4c1-31f532491e70
Sykulski, J. K.
d6885caf-aaed-4d12-9ef3-46c4c3bbd7fb
Li, M., Kim, D. H., Lowther, D. A. and Sykulski, J. K.
(2008)
A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices.
IEEE Transactions on Magnetics, 44 (6), .
Abstract
This paper presents a novel method for the computation of force in an electrostatically operated microelectromechanical systems (MEMS) device. The approach is based on continuum design sensitivity analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micromirror, and numerical results are compared with experimental measurements on the real device.
Text
IEEEvol44no6June2008page1610.pdf
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Published date: June 2008
Keywords:
Continuum design sensitivity analysis (CDSA), force calculation, microelectromechanical system (MEMS) devices
Organisations:
EEE
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Local EPrints ID: 265844
URI: http://eprints.soton.ac.uk/id/eprint/265844
ISSN: 0018-9464
PURE UUID: 4ca57ed3-1fb4-4b04-b531-77eba1c37ff9
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Date deposited: 04 Jun 2008 13:08
Last modified: 15 Mar 2024 02:34
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Contributors
Author:
M. Li
Author:
D. H. Kim
Author:
D. A. Lowther
Author:
J. K. Sykulski
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