Ulliac, G, Courjal, N, Chong, H M H and De La Rue, R M (2008) Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching. Optical Materials, 31 (2), 196-200.
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Article
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BATCH_PROCESS_FOR_THE_FABRICATION_OF_LINBO3_PHC_USING_PROTON_EXCHANGE.pdf
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Published date: 11 March 2008
Keywords:
Lithium Niobate, Reactive ion etching, Proton exchange, Batch fabrication
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 265983
URI: http://eprints.soton.ac.uk/id/eprint/265983
PURE UUID: f4790811-ae19-46df-aa6a-47ae13a924f5
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Date deposited: 20 Jun 2008 13:57
Last modified: 15 Mar 2024 03:30
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Contributors
Author:
G Ulliac
Author:
N Courjal
Author:
H M H Chong
Author:
R M De La Rue
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