The University of Southampton
University of Southampton Institutional Repository

Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching

Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching
Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching
Lithium Niobate, Reactive ion etching, Proton exchange, Batch fabrication
196-200
Ulliac, G
0c969a2a-078f-422f-9dbc-f22162c49fe9
Courjal, N
75b939a8-8178-4340-b203-833c6892cdb5
Chong, H M H
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
De La Rue, R M
f172f931-c862-4a66-a3a4-731e362174da
Ulliac, G
0c969a2a-078f-422f-9dbc-f22162c49fe9
Courjal, N
75b939a8-8178-4340-b203-833c6892cdb5
Chong, H M H
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
De La Rue, R M
f172f931-c862-4a66-a3a4-731e362174da

Ulliac, G, Courjal, N, Chong, H M H and De La Rue, R M (2008) Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching. Optical Materials, 31 (2), 196-200.

Record type: Article
Text
BATCH_PROCESS_FOR_THE_FABRICATION_OF_LINBO3_PHC_USING_PROTON_EXCHANGE.pdf - Other
Download (1MB)

More information

Published date: 11 March 2008
Keywords: Lithium Niobate, Reactive ion etching, Proton exchange, Batch fabrication
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 265983
URI: http://eprints.soton.ac.uk/id/eprint/265983
PURE UUID: f4790811-ae19-46df-aa6a-47ae13a924f5
ORCID for H M H Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 20 Jun 2008 13:57
Last modified: 15 Mar 2024 03:30

Export record

Contributors

Author: G Ulliac
Author: N Courjal
Author: H M H Chong ORCID iD
Author: R M De La Rue

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×