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Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching

Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching
Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching
Lithium Niobate, Reactive ion etching, Proton exchange, Batch fabrication
196-200
Ulliac, G
0c969a2a-078f-422f-9dbc-f22162c49fe9
Courjal, N
75b939a8-8178-4340-b203-833c6892cdb5
Chong, H M H
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
De La Rue, R M
f172f931-c862-4a66-a3a4-731e362174da
Ulliac, G
0c969a2a-078f-422f-9dbc-f22162c49fe9
Courjal, N
75b939a8-8178-4340-b203-833c6892cdb5
Chong, H M H
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
De La Rue, R M
f172f931-c862-4a66-a3a4-731e362174da

Ulliac, G, Courjal, N, Chong, H M H and De La Rue, R M (2008) Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching. Optical Materials, 31 (2), 196-200.

Record type: Article
Text
BATCH_PROCESS_FOR_THE_FABRICATION_OF_LINBO3_PHC_USING_PROTON_EXCHANGE.pdf - Other
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More information

Published date: 11 March 2008
Keywords: Lithium Niobate, Reactive ion etching, Proton exchange, Batch fabrication
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 265983
URI: https://eprints.soton.ac.uk/id/eprint/265983
PURE UUID: f4790811-ae19-46df-aa6a-47ae13a924f5
ORCID for H M H Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 20 Jun 2008 13:57
Last modified: 20 Jul 2019 00:51

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Contributors

Author: G Ulliac
Author: N Courjal
Author: H M H Chong ORCID iD
Author: R M De La Rue

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