Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures
Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures
Thick-film piezoelectric free-standing structures fabricated with a combination of conventional thick-film technology and a sacrificial layer technique are presented. The structures were fabricated in the form of composite cantilevers, consisting of lead zirconate titanate (PZT) as the functional element and silver/palladium (Ag/Pd) as the electrodes. The cantilevers are free standing above a substrate and are able to operate at low levels of vibration suitable for harvesting energy from the environment. An open circuit output voltage of 130 mV was measured from a sample of length 18 mm, width 9 mm and PZT thickness of 80 micron. The sample was found to produce a maximum output electrical power of 10 nW at its resonant frequency of 237.5 Hz and acceleration level of 0.981 m/s2 when driving a 60 k? resistive load. The output power was found to increase exponentially with acceleration. At an acceleration of 9.81 ms-2, 270 nW of power was produced. The output power can be improved by attaching a proof mass at the tip of the cantilever beam. A beam having a proof mass of 1.14 g, resulted in an eight-fold improvement of output power compared to a device with no added proof mass at the same acceleration level of 0.98 ms-2.
White, N. M.
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Harris, N. R.
237cfdbd-86e4-4025-869c-c85136f14dfd
Kok, S. L.
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Tudor, M. J.
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White, N. M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Harris, N. R.
237cfdbd-86e4-4025-869c-c85136f14dfd
Kok, S. L.
b54e40a3-13b5-4793-9571-90373cbd8ee8
Tudor, M. J.
46eea408-2246-4aa0-8b44-86169ed601ff
White, N. M., Harris, N. R., Kok, S. L. and Tudor, M. J.
(2008)
Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures.
2nd Electronics System-Integration Technology, Greenwich, London Borough of, United Kingdom.
01 - 04 Sep 2008.
Record type:
Conference or Workshop Item
(Other)
Abstract
Thick-film piezoelectric free-standing structures fabricated with a combination of conventional thick-film technology and a sacrificial layer technique are presented. The structures were fabricated in the form of composite cantilevers, consisting of lead zirconate titanate (PZT) as the functional element and silver/palladium (Ag/Pd) as the electrodes. The cantilevers are free standing above a substrate and are able to operate at low levels of vibration suitable for harvesting energy from the environment. An open circuit output voltage of 130 mV was measured from a sample of length 18 mm, width 9 mm and PZT thickness of 80 micron. The sample was found to produce a maximum output electrical power of 10 nW at its resonant frequency of 237.5 Hz and acceleration level of 0.981 m/s2 when driving a 60 k? resistive load. The output power was found to increase exponentially with acceleration. At an acceleration of 9.81 ms-2, 270 nW of power was produced. The output power can be improved by attaching a proof mass at the tip of the cantilever beam. A beam having a proof mass of 1.14 g, resulted in an eight-fold improvement of output power compared to a device with no added proof mass at the same acceleration level of 0.98 ms-2.
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e-pub ahead of print date: 2008
Additional Information:
Event Dates: 1 - 4 September 2008
Venue - Dates:
2nd Electronics System-Integration Technology, Greenwich, London Borough of, United Kingdom, 2008-09-01 - 2008-09-04
Organisations:
EEE
Identifiers
Local EPrints ID: 266153
URI: http://eprints.soton.ac.uk/id/eprint/266153
PURE UUID: 599a8fbf-8e65-4f49-b7c8-fdc18308b269
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Date deposited: 18 Jul 2008 10:17
Last modified: 15 Mar 2024 02:46
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