The University of Southampton
University of Southampton Institutional Repository

Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique

Kok, S. L., White, N. M. and Harris, N. R. (2008) Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique At Electroceramics XI, United Kingdom. 01 - 03 Sep 2008.

Record type: Conference or Workshop Item (Other)


Combinations of conventional thick-film technology and sacrificial layer techniques were used to fabricate free-standing structures, in the form of cantilever beams. By taking advantage of the different thermal expansion coefficients between silver/palladium (Ag/Pd) and piezoceramic Pb(Zr, Ti)O3, it was possible to fabricate a flat, but angled cantilever. In this work, sandwich structures consisting of PZT layers and Ag/Pd conductors, with in either interdigitated (IDT) or plated electrode configurations were fabricated in order to investigate the structural strength and the characteristics of free-standing structures. Screen printed carbon was used as a sacrificial layer. In the final step of the process, this was burnt out at a temperature of 850 C in an air environment. This resulted in a free-standing, sandwich structure of PZT-Ag/Pd. In order to reduce the problems of process complexity, a one-step firing process was used, whereby the sacrificial layer was co-fired together with PZT-Ag/Pd layers. The measurement results showed that the materials have a piezoelectric charge coefficient, d31 of -25 pC/N and coupling coefficient, k31 of 0.125. The cantilever structures were found to have a maximum Q-factor of around 200, and produced useful amounts of electrical power when driving resistive loads at low acceleration levels.

PDF A-030-O.pdf - Other
Download (297kB)

More information

Submitted date: 2008
Additional Information: Event Dates: 1 - 3 September 2008
Venue - Dates: Electroceramics XI, United Kingdom, 2008-09-01 - 2008-09-03
Organisations: EEE


Local EPrints ID: 266154
PURE UUID: 67c01310-d24e-4df5-bf49-19c0ea8b8e21
ORCID for N. M. White: ORCID iD
ORCID for N. R. Harris: ORCID iD

Catalogue record

Date deposited: 18 Jul 2008 10:26
Last modified: 18 Jul 2017 07:19

Export record


Author: S. L. Kok
Author: N. M. White ORCID iD
Author: N. R. Harris ORCID iD

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton:

ePrints Soton supports OAI 2.0 with a base URL of

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.