Zheng, Y., Mizuta, Hiroshi, Tsuchiya, Yoshishige, Endo, M., Sato, D. and Oda, S. (2005) In situ real-time spectroscopic ellipsometry study of HfO2 thin films grown by using the pulsed-source MOCVD. Journal of Applied Physics, 97, 23527.
Record type:
Article
More information
Published date: 2005
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 266189
URI: http://eprints.soton.ac.uk/id/eprint/266189
ISSN: 0021-8979
PURE UUID: f58c4f94-01e0-4568-80a7-fb050080b232
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Date deposited: 21 Jul 2008 15:46
Last modified: 14 Mar 2024 08:22
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Contributors
Author:
Y. Zheng
Author:
Hiroshi Mizuta
Author:
Yoshishige Tsuchiya
Author:
M. Endo
Author:
D. Sato
Author:
S. Oda
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