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In situ real-time spectroscopic ellipsometry study of HfO2 thin films grown by using the pulsed-source MOCVD

In situ real-time spectroscopic ellipsometry study of HfO2 thin films grown by using the pulsed-source MOCVD
In situ real-time spectroscopic ellipsometry study of HfO2 thin films grown by using the pulsed-source MOCVD
0021-8979
23527
Zheng, Y.
4f14b365-2ced-4b7c-bc00-d1599153a12e
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Endo, M.
7142e67b-284b-42ee-82b8-a2f502d57de1
Sato, D.
878baba7-304f-45db-a0f3-c2bfe8a8b010
Oda, S.
4a88f225-39f6-4c89-a9da-8c35fbfe6fde
Zheng, Y.
4f14b365-2ced-4b7c-bc00-d1599153a12e
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Endo, M.
7142e67b-284b-42ee-82b8-a2f502d57de1
Sato, D.
878baba7-304f-45db-a0f3-c2bfe8a8b010
Oda, S.
4a88f225-39f6-4c89-a9da-8c35fbfe6fde

Zheng, Y., Mizuta, Hiroshi, Tsuchiya, Yoshishige, Endo, M., Sato, D. and Oda, S. (2005) In situ real-time spectroscopic ellipsometry study of HfO2 thin films grown by using the pulsed-source MOCVD. Journal of Applied Physics, 97, 23527.

Record type: Article
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Published date: 2005
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 266189
URI: http://eprints.soton.ac.uk/id/eprint/266189
ISSN: 0021-8979
PURE UUID: f58c4f94-01e0-4568-80a7-fb050080b232

Catalogue record

Date deposited: 21 Jul 2008 15:46
Last modified: 20 Nov 2021 08:28

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Contributors

Author: Y. Zheng
Author: Hiroshi Mizuta
Author: Yoshishige Tsuchiya
Author: M. Endo
Author: D. Sato
Author: S. Oda

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