Reduction of grain-boundary potential barrier height in polycrystalline silicon with hot H2O vapor annealing probed using point-contact devices
Reduction of grain-boundary potential barrier height in polycrystalline silicon with hot H2O vapor annealing probed using point-contact devices
1000-1003
Kamiya, T.
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Durrani, Z. A. K.
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Ahmed, H,
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Sameshima, T.
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Furuta, Y.
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Mizuta, Hiroshi
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Lloyd, N.
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2003
Kamiya, T.
d52831ff-3dba-4d58-abd2-55958ebade6e
Durrani, Z. A. K.
193df358-3ef5-4cd9-8f77-359c697e839d
Ahmed, H,
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Sameshima, T.
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Furuta, Y.
2b3632d6-4ef3-4bce-a686-0e0973b35dcd
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Lloyd, N.
d1a775da-d959-4619-997b-1ca076f2061e
Kamiya, T., Durrani, Z. A. K., Ahmed, H,, Sameshima, T., Furuta, Y., Mizuta, Hiroshi and Lloyd, N.
(2003)
Reduction of grain-boundary potential barrier height in polycrystalline silicon with hot H2O vapor annealing probed using point-contact devices.
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, 21, .
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Published date: 2003
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 266256
URI: http://eprints.soton.ac.uk/id/eprint/266256
ISSN: 0734-211X
PURE UUID: bb3d24fb-84f7-4fb8-a296-c7a8a115e7b5
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Date deposited: 22 Jul 2008 14:51
Last modified: 14 Mar 2024 08:24
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Contributors
Author:
T. Kamiya
Author:
Z. A. K. Durrani
Author:
H, Ahmed
Author:
T. Sameshima
Author:
Y. Furuta
Author:
Hiroshi Mizuta
Author:
N. Lloyd
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