Mechanism of One-Directional Nano Etching in Silicon Using Magnetic-Field-Assisted Anodization
Mechanism of One-Directional Nano Etching in Silicon Using Magnetic-Field-Assisted Anodization
Hippo, D.
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Urakawa, K.
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Tsuchiya, Yoshishige
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Mizuta, Hiroshi
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Koshida, N.
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Oda, S.
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March 2008
Hippo, D.
cc10ed6d-7122-4ea4-a116-b81c8dd7c5c3
Urakawa, K.
7fccb2d1-998f-459e-9757-973f1b25803f
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Koshida, N.
4dfd7d69-bba7-4a07-b428-97f917dc1a15
Oda, S.
4a88f225-39f6-4c89-a9da-8c35fbfe6fde
Hippo, D., Urakawa, K., Tsuchiya, Yoshishige, Mizuta, Hiroshi, Koshida, N. and Oda, S.
(2008)
Mechanism of One-Directional Nano Etching in Silicon Using Magnetic-Field-Assisted Anodization.
Porous Semiconductors Science and Technology 2008, Mallorca.
Record type:
Conference or Workshop Item
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cpaper_145.pdf
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Published date: March 2008
Additional Information:
Event Dates: March 2008
Venue - Dates:
Porous Semiconductors Science and Technology 2008, Mallorca, 2008-03-01
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 266271
URI: http://eprints.soton.ac.uk/id/eprint/266271
PURE UUID: bd36756e-d94b-4c61-9e97-2ad3250fc742
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Date deposited: 23 Jul 2008 09:15
Last modified: 14 Mar 2024 08:25
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Contributors
Author:
D. Hippo
Author:
K. Urakawa
Author:
Yoshishige Tsuchiya
Author:
Hiroshi Mizuta
Author:
N. Koshida
Author:
S. Oda
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