The University of Southampton
University of Southampton Institutional Repository

Mechanism of One-Directional Nano Etching in Silicon Using Magnetic-Field-Assisted Anodization

Mechanism of One-Directional Nano Etching in Silicon Using Magnetic-Field-Assisted Anodization
Mechanism of One-Directional Nano Etching in Silicon Using Magnetic-Field-Assisted Anodization
Hippo, D.
cc10ed6d-7122-4ea4-a116-b81c8dd7c5c3
Urakawa, K.
7fccb2d1-998f-459e-9757-973f1b25803f
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Koshida, N.
4dfd7d69-bba7-4a07-b428-97f917dc1a15
Oda, S.
4a88f225-39f6-4c89-a9da-8c35fbfe6fde
Hippo, D.
cc10ed6d-7122-4ea4-a116-b81c8dd7c5c3
Urakawa, K.
7fccb2d1-998f-459e-9757-973f1b25803f
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Koshida, N.
4dfd7d69-bba7-4a07-b428-97f917dc1a15
Oda, S.
4a88f225-39f6-4c89-a9da-8c35fbfe6fde

Hippo, D., Urakawa, K., Tsuchiya, Yoshishige, Mizuta, Hiroshi, Koshida, N. and Oda, S. (2008) Mechanism of One-Directional Nano Etching in Silicon Using Magnetic-Field-Assisted Anodization. Porous Semiconductors Science and Technology 2008.

Record type: Conference or Workshop Item (Other)
PDF
cpaper_145.pdf - Other
Download (276kB)

More information

Published date: March 2008
Additional Information: Event Dates: March 2008
Venue - Dates: Porous Semiconductors Science and Technology 2008, 2008-03-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 266271
URI: https://eprints.soton.ac.uk/id/eprint/266271
PURE UUID: bd36756e-d94b-4c61-9e97-2ad3250fc742

Catalogue record

Date deposited: 23 Jul 2008 09:15
Last modified: 18 Jul 2017 07:17

Export record

Contributors

Author: D. Hippo
Author: K. Urakawa
Author: Yoshishige Tsuchiya
Author: Hiroshi Mizuta
Author: N. Koshida
Author: S. Oda

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×