Hippo, D., Kawata, Y., Tsuchiya, Yoshishige, Mizuta, Hiroshi, Oda, S., Urakawa, K. and Koshida, N. (2006) Fabrication of silicon 3D photonic crystal structures in 100nm scale using double directional etching method. Conference on lasers and electro-optics / Quantum electronics and laser science conference, Long Beach. p. 114 .
Record type:
Conference or Workshop Item
(Other)
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Published date: May 2006
Additional Information:
Event Dates: May 2006
Venue - Dates:
Conference on lasers and electro-optics / Quantum electronics and laser science conference, Long Beach, 2006-05-01
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 266298
URI: http://eprints.soton.ac.uk/id/eprint/266298
PURE UUID: f7850304-6d25-4ab9-a294-a617e583fdc9
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Date deposited: 23 Jul 2008 10:33
Last modified: 14 Mar 2024 08:25
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Contributors
Author:
D. Hippo
Author:
Y. Kawata
Author:
Yoshishige Tsuchiya
Author:
Hiroshi Mizuta
Author:
S. Oda
Author:
K. Urakawa
Author:
N. Koshida
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