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Advanced studies of high-k gate dielectrics toward future generation with equivalent gate oxide thickness of less than 1 nm

Advanced studies of high-k gate dielectrics toward future generation with equivalent gate oxide thickness of less than 1 nm
Advanced studies of high-k gate dielectrics toward future generation with equivalent gate oxide thickness of less than 1 nm
pp 118-121
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Fujita, H.
26316f23-b687-4849-875b-3f8180761e1d
Sato, D.
878baba7-304f-45db-a0f3-c2bfe8a8b010
Endoh, M.
a40ae6a7-2e2e-4297-af09-efaa8f561f42
Kurosawa, M.
59037d4d-b98c-4f46-aec1-8229da27d23b
Nohira, H.
79e58176-2227-4989-bf1a-c03f07764e15
Hattori, T.
03686cfe-2164-450c-8a3c-735d1509ac94
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Oda, S.
4a88f225-39f6-4c89-a9da-8c35fbfe6fde
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Fujita, H.
26316f23-b687-4849-875b-3f8180761e1d
Sato, D.
878baba7-304f-45db-a0f3-c2bfe8a8b010
Endoh, M.
a40ae6a7-2e2e-4297-af09-efaa8f561f42
Kurosawa, M.
59037d4d-b98c-4f46-aec1-8229da27d23b
Nohira, H.
79e58176-2227-4989-bf1a-c03f07764e15
Hattori, T.
03686cfe-2164-450c-8a3c-735d1509ac94
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Oda, S.
4a88f225-39f6-4c89-a9da-8c35fbfe6fde

Tsuchiya, Yoshishige, Fujita, H., Sato, D., Endoh, M., Kurosawa, M., Nohira, H., Hattori, T., Mizuta, Hiroshi and Oda, S. (2004) Advanced studies of high-k gate dielectrics toward future generation with equivalent gate oxide thickness of less than 1 nm. 7th China-Japan Symposium on Thin Films, Chengdu Sichuan. pp 118-121 .

Record type: Conference or Workshop Item (Other)
Text
cpaper_088.pdf - Other
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More information

Published date: September 2004
Additional Information: Event Dates: September 2004
Venue - Dates: 7th China-Japan Symposium on Thin Films, Chengdu Sichuan, 2004-08-31
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 266388
URI: http://eprints.soton.ac.uk/id/eprint/266388
PURE UUID: a95e4919-959a-4ce0-97e6-a360118ff2d1

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Date deposited: 28 Jul 2008 08:51
Last modified: 20 Nov 2021 08:37

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Contributors

Author: Yoshishige Tsuchiya
Author: H. Fujita
Author: D. Sato
Author: M. Endoh
Author: M. Kurosawa
Author: H. Nohira
Author: T. Hattori
Author: Hiroshi Mizuta
Author: S. Oda

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