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Fabrication of lateral superlattices on GaAs/AlGaAs heterostructures by gas-assisted focused ion beam etching

Fabrication of lateral superlattices on GaAs/AlGaAs heterostructures by gas-assisted focused ion beam etching
Fabrication of lateral superlattices on GaAs/AlGaAs heterostructures by gas-assisted focused ion beam etching
Goodings, C. J.
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Mizuta, Hiroshi
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Ochiai, Y.
c0767919-6489-46f0-bd3e-1b69939bdd2b
Cleaver, J. R. A.
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Ahmed, H.
f9dabf57-dea0-4cf9-b989-c812b5eedeaf
Goodings, C. J.
d097f31c-5e51-43a8-8809-0d681ba4a934
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Ochiai, Y.
c0767919-6489-46f0-bd3e-1b69939bdd2b
Cleaver, J. R. A.
c552937c-6985-41f4-9454-79be139e1413
Ahmed, H.
f9dabf57-dea0-4cf9-b989-c812b5eedeaf

Goodings, C. J., Mizuta, Hiroshi, Ochiai, Y., Cleaver, J. R. A. and Ahmed, H. (1990) Fabrication of lateral superlattices on GaAs/AlGaAs heterostructures by gas-assisted focused ion beam etching. Symposium on Nanostructures: Fabrication and physics, 1990 Fall Meeting of Materials Research Society.

Record type: Conference or Workshop Item (Other)

Full text not available from this repository.

More information

Published date: 1990
Additional Information: Event Dates: 1990
Venue - Dates: Symposium on Nanostructures: Fabrication and physics, 1990 Fall Meeting of Materials Research Society, 1990-01-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 266439
URI: https://eprints.soton.ac.uk/id/eprint/266439
PURE UUID: 794121b1-2041-49d6-a990-9038fdc14b53

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Date deposited: 30 Jul 2008 10:04
Last modified: 18 Jul 2017 07:16

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