Fabrication of lateral superlattices on GaAs/AlGaAs heterostructures by gas-assisted focused ion beam etching


Goodings, C. J., Mizuta, Hiroshi, Ochiai, Y., Cleaver, J. R. A. and Ahmed, H. (1990) Fabrication of lateral superlattices on GaAs/AlGaAs heterostructures by gas-assisted focused ion beam etching At Symposium on Nanostructures: Fabrication and physics, 1990 Fall Meeting of Materials Research Society.

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Item Type: Conference or Workshop Item (Other)
Additional Information: Event Dates: 1990
Venue - Dates: Symposium on Nanostructures: Fabrication and physics, 1990 Fall Meeting of Materials Research Society, 1990-01-01
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 266439
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Date Event
1990Published
Date Deposited: 30 Jul 2008 10:04
Last Modified: 17 Apr 2017 19:03
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/266439

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