Nano-electro-mechanical device application of neosilicon
Nano-electro-mechanical device application of neosilicon
1-2
Shimada, T.
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Ando, M.
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Yamaguchi, S.
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Momo, N.
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Takai, K.
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Tsuchiya, Yoshishige
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Mizuta, Hiroshi
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Oda, S.
4a88f225-39f6-4c89-a9da-8c35fbfe6fde
2004
Shimada, T.
a6294be4-3bcc-4436-90e5-70289e2bf523
Ando, M.
3d93f5fa-f4de-42a9-98a8-0d716cf1e3ee
Yamaguchi, S.
1e006b33-de16-446c-bcbd-e1de27803f65
Momo, N.
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Takai, K.
a7d0e006-d9bd-4118-ae75-2a81aa1a64f8
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Oda, S.
4a88f225-39f6-4c89-a9da-8c35fbfe6fde
Shimada, T., Ando, M., Yamaguchi, S., Momo, N., Takai, K., Tsuchiya, Yoshishige, Mizuta, Hiroshi and Oda, S.
(2004)
Nano-electro-mechanical device application of neosilicon.
CREST FEMD New Letter, 6 (1), .
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More information
Published date: 2004
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 266481
URI: http://eprints.soton.ac.uk/id/eprint/266481
PURE UUID: 872ca2e5-82a7-4344-b730-90bebb0f3f70
Catalogue record
Date deposited: 01 Aug 2008 12:13
Last modified: 10 Dec 2021 22:18
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Contributors
Author:
T. Shimada
Author:
M. Ando
Author:
S. Yamaguchi
Author:
N. Momo
Author:
K. Takai
Author:
Yoshishige Tsuchiya
Author:
Hiroshi Mizuta
Author:
S. Oda
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