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Nano-electro-mechanical device application of neosilicon

Shimada, T., Ando, M., Yamaguchi, S., Momo, N., Takai, K., Tsuchiya, Yoshishige, Mizuta, Hiroshi and Oda, S. (2004) Nano-electro-mechanical device application of neosilicon CREST FEMD New Letter, 6, (1), pp. 1-2.

Record type: Article

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Published date: 2004
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 266481
PURE UUID: 872ca2e5-82a7-4344-b730-90bebb0f3f70

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Date deposited: 01 Aug 2008 12:13
Last modified: 18 Jul 2017 07:15

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Author: T. Shimada
Author: M. Ando
Author: S. Yamaguchi
Author: N. Momo
Author: K. Takai
Author: Yoshishige Tsuchiya
Author: Hiroshi Mizuta
Author: S. Oda

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