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Fabrication of fully functional AC-electroosmosis micropump with 3D high aspect ratio electrodes using only SU-8

Fabrication of fully functional AC-electroosmosis micropump with 3D high aspect ratio electrodes using only SU-8
Fabrication of fully functional AC-electroosmosis micropump with 3D high aspect ratio electrodes using only SU-8
Rouabah, Hamza A.
02f01a55-f938-40bb-be44-8863c4cfbcb5
Park, P.Y.
ba4f8d2f-ef87-40bf-b514-b39a935efaa9
Zaouk, R.B.
6649c44b-08c3-493e-b1ca-2f5487307e07
Morgan, Hywel
de00d59f-a5a2-48c4-a99a-1d5dd7854174
Madou, M.J.
129ba94c-8d15-40fa-92ab-835279f6bf11
Green, Nicolas
d9b47269-c426-41fd-a41d-5f4579faa581
Rouabah, Hamza A.
02f01a55-f938-40bb-be44-8863c4cfbcb5
Park, P.Y.
ba4f8d2f-ef87-40bf-b514-b39a935efaa9
Zaouk, R.B.
6649c44b-08c3-493e-b1ca-2f5487307e07
Morgan, Hywel
de00d59f-a5a2-48c4-a99a-1d5dd7854174
Madou, M.J.
129ba94c-8d15-40fa-92ab-835279f6bf11
Green, Nicolas
d9b47269-c426-41fd-a41d-5f4579faa581

Rouabah, Hamza A., Park, P.Y., Zaouk, R.B., Morgan, Hywel, Madou, M.J. and Green, Nicolas (2007) Fabrication of fully functional AC-electroosmosis micropump with 3D high aspect ratio electrodes using only SU-8. Proceedings of Micromechanics Europe (MME 2007), Guimaraes, Portugal. 15 - 17 Sep 2007.

Record type: Conference or Workshop Item (Paper)

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More information

Published date: September 2007
Venue - Dates: Proceedings of Micromechanics Europe (MME 2007), Guimaraes, Portugal, 2007-09-15 - 2007-09-17
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 266546
URI: http://eprints.soton.ac.uk/id/eprint/266546
PURE UUID: 819b2642-eb84-4756-ab58-3b8ac2928244
ORCID for Hywel Morgan: ORCID iD orcid.org/0000-0003-4850-5676
ORCID for Nicolas Green: ORCID iD orcid.org/0000-0001-9230-4455

Catalogue record

Date deposited: 06 Aug 2008 02:32
Last modified: 11 Dec 2021 03:59

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Contributors

Author: Hamza A. Rouabah
Author: P.Y. Park
Author: R.B. Zaouk
Author: Hywel Morgan ORCID iD
Author: M.J. Madou
Author: Nicolas Green ORCID iD

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