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Formation Mechanism of 100 nm-Scale Periodic-Structures in Silicon Using Magnetic-Field-Assisted Anodization

Formation Mechanism of 100 nm-Scale Periodic-Structures in Silicon Using Magnetic-Field-Assisted Anodization
Formation Mechanism of 100 nm-Scale Periodic-Structures in Silicon Using Magnetic-Field-Assisted Anodization
0021-4922
7398-7402
Hippo, D
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Urakawa, K
3bab5dcf-2a8e-492b-95be-198423302756
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Mizuta, Hiroshi
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Koshida, N
ebc1fb0f-62ec-4a92-bf2a-fa668743cca3
Oda, S
514339b3-f8de-4750-8d20-c520834b2477
Hippo, D
6ea1e4b6-d387-4400-a339-c8bebbb80109
Urakawa, K
3bab5dcf-2a8e-492b-95be-198423302756
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Koshida, N
ebc1fb0f-62ec-4a92-bf2a-fa668743cca3
Oda, S
514339b3-f8de-4750-8d20-c520834b2477

Hippo, D, Urakawa, K, Tsuchiya, Yoshishige, Mizuta, Hiroshi, Koshida, N and Oda, S (2008) Formation Mechanism of 100 nm-Scale Periodic-Structures in Silicon Using Magnetic-Field-Assisted Anodization. Japanese Journal of Applied Physics, 47, 7398-7402.

Record type: Article
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JJAP-47-7398.pdf - Other
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Published date: 2008
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 266748
URI: http://eprints.soton.ac.uk/id/eprint/266748
ISSN: 0021-4922
PURE UUID: 94ce76dd-9c46-427d-9983-3ec12cef5850

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Date deposited: 02 Oct 2008 18:46
Last modified: 14 Mar 2024 08:34

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Contributors

Author: D Hippo
Author: K Urakawa
Author: Yoshishige Tsuchiya
Author: Hiroshi Mizuta
Author: N Koshida
Author: S Oda

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