Towards a nanostructured thermoelectric generator using ion-track lithography

Koukharenko, Elena, Li, X., Nandhakumar, Iris, Frety, N., Beeby, Steve, Cox, D., Tudor, John, Schiedt, B., Trautmann, C., Bertcsh, A. and White, Neil (2008) Towards a nanostructured thermoelectric generator using ion-track lithography Journal of Micromechanics and Microengineering, 18, (10), p. 104015. (doi:10.1088/0960-1317/18/10/104015).


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This paper presents the process development towards a new generation of nanostructured thermoelectric generators for power harvesting from small temperature gradients by using a combination of traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography. Polyimide nanotemplates with pore diameters ranging from 30 nm to 120 nm were fabricated. Preliminary results from the fabrication of poly(methyl methacrylate) (PMMA)-nanostructured templates are reported. Bi2Te3 nanowires (80 and 120 nm diameters) were electroplated into polyimide ion-track nanotemplates. Bi2Te3 nanowires of a R3 m structure, with preferential orientation in (1 1 0) crystallographic plans, were electroplated. The chemical composition of Bi2Te3 with nearly stoichiometric composition (Bi2.31Te3) was obtained. Homogeneity profiles of the chemical composition were obtained. A fine-grained observed microstructure (6–10 nm) and (1 1 0) crystalline orientation were obtained, which is extremely promising for improving the thermoelectric material properties. The thermoelectric properties of the Bi2Te3-electroplated thin films (Seebeck coefficient ?) and electrical resistivity of the Bi2Te3 bundle nanowires were found to be ?52 ?V K?1 and ?14 M cm, respectively. Polyimide (Kapton foil) and PMMA 950 photoresists were promising materials for the realization of a nanostructured thermoelectric generator on flexible and rigid substrates, respectively

Item Type: Article
Digital Object Identifier (DOI): doi:10.1088/0960-1317/18/10/104015
ISSNs: 0960-1317 (print)
Organisations: EEE
ePrint ID: 266985
Date :
Date Event
29 September 2008Published
Date Deposited: 16 Dec 2008 14:13
Last Modified: 17 Apr 2017 18:55
Further Information:Google Scholar

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