The University of Southampton
University of Southampton Institutional Repository

Metal Induced Lateral Crystallization of Amorphous Silicon Nanoribbons for Application in Biosensors

Sun, K., Hakim, M. M. A. and Ashburn, P. (2009) Metal Induced Lateral Crystallization of Amorphous Silicon Nanoribbons for Application in Biosensors At E-MRS 2009 Spring Meeting, France. 08 - 12 Jun 2009.

Record type: Conference or Workshop Item (Other)


Recently, Si nanowires and micron-wide nanoribbons are gaining much attention for biosensing because they offer real-time, label-free, high sensitivity sensing. Currently Si nanowires are fabricated using CMOS technology, SOI substrates and e-beam lithography, which give high costs. In this paper we investigate a lower cost alternative using TFT technology and study the lateral crystallization of Si nanoribbons for application in Si biosensors. A comparison is made of the crystallization of a-Si on SiO2 and on air for use in top-gate and surround-gate sensors. The crystallization is assessed using Normarski microscopy, planar and cross-sectional SEM and defect etching. The results show better lateral crystallization for Si-on-Air than Si-on-Oxide. For a 10h anneal at 550°C, the crystallization extended 24um for Si-on-Air and 11um for Si-on-SiO2, whilst a 20h anneal at 525°C gives 7.7um and 4.9um respectively. Plan-view SEM images also show slightly lower NiSi2 precipitates in Si-on-Air than Si-on-Oxide. Cross-section SEM images show randomly nucleated grains at the bottom of the crystallized layer, with a density of 1.3/um and 3.2/um for Si-on-Air and Si-on-Oxide, indicating the suppression of random grain nucleation in Si-on-Air samples. These results promise better electrical performance from crystallized Si-on-Air sensors than Si-on-Oxide sensors.

Full text not available from this repository.

More information

Published date: 8 June 2009
Additional Information: Event Dates: June 8 to 12
Venue - Dates: E-MRS 2009 Spring Meeting, France, 2009-06-08 - 2009-06-12
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 267245
PURE UUID: ce0a6323-8c49-4d53-9d50-a2b20081a49f

Catalogue record

Date deposited: 01 Apr 2009 16:10
Last modified: 18 Jul 2017 07:06

Export record


Author: K. Sun
Author: M. M. A. Hakim
Author: P. Ashburn

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton:

ePrints Soton supports OAI 2.0 with a base URL of

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.