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Metal Induced Lateral Crystallization of Amorphous Silicon Nanoribbons for Application in Biosensors

Record type: Conference or Workshop Item (Other)

Recently, Si nanowires and micron-wide nanoribbons are gaining much attention for biosensing because they offer real-time, label-free, high sensitivity sensing. Currently Si nanowires are fabricated using CMOS technology, SOI substrates and e-beam lithography, which give high costs. In this paper we investigate a lower cost alternative using TFT technology and study the lateral crystallization of Si nanoribbons for application in Si biosensors. A comparison is made of the crystallization of a-Si on SiO2 and on air for use in top-gate and surround-gate sensors. The crystallization is assessed using Normarski microscopy, planar and cross-sectional SEM and defect etching. The results show better lateral crystallization for Si-on-Air than Si-on-Oxide. For a 10h anneal at 550°C, the crystallization extended 24um for Si-on-Air and 11um for Si-on-SiO2, whilst a 20h anneal at 525°C gives 7.7um and 4.9um respectively. Plan-view SEM images also show slightly lower NiSi2 precipitates in Si-on-Air than Si-on-Oxide. Cross-section SEM images show randomly nucleated grains at the bottom of the crystallized layer, with a density of 1.3/um and 3.2/um for Si-on-Air and Si-on-Oxide, indicating the suppression of random grain nucleation in Si-on-Air samples. These results promise better electrical performance from crystallized Si-on-Air sensors than Si-on-Oxide sensors.

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Citation

Sun, K., Hakim, M. M. A. and Ashburn, P. (2009) Metal Induced Lateral Crystallization of Amorphous Silicon Nanoribbons for Application in Biosensors At E-MRS 2009 Spring Meeting, France. 08 - 12 Jun 2009.

More information

Published date: 8 June 2009
Additional Information: Event Dates: June 8 to 12
Venue - Dates: E-MRS 2009 Spring Meeting, France, 2009-06-08 - 2009-06-12
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 267245
URI: http://eprints.soton.ac.uk/id/eprint/267245
PURE UUID: ce0a6323-8c49-4d53-9d50-a2b20081a49f

Catalogue record

Date deposited: 01 Apr 2009 16:10
Last modified: 18 Jul 2017 07:06

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Contributors

Author: K. Sun
Author: M. M. A. Hakim
Author: P. Ashburn

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