Functional silicon nanoelectronic devices co-integrated with nanoelectromechanical structures
Functional silicon nanoelectronic devices co-integrated with nanoelectromechanical structures
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Oda, S
514339b3-f8de-4750-8d20-c520834b2477
10 September 2009
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Oda, S
514339b3-f8de-4750-8d20-c520834b2477
Mizuta, Hiroshi, Tsuchiya, Yoshishige and Oda, S
(2009)
Functional silicon nanoelectronic devices co-integrated with nanoelectromechanical structures.
JSAP Symposium on Development of Neosilicon for 'More-than'Moore' Era, Toyama.
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Published date: 10 September 2009
Venue - Dates:
JSAP Symposium on Development of Neosilicon for 'More-than'Moore' Era, Toyama, 2009-09-09
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 267624
URI: http://eprints.soton.ac.uk/id/eprint/267624
PURE UUID: bf148bcd-847d-41f2-a1bd-7c1d8b83ddb7
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Date deposited: 26 Jun 2009 17:06
Last modified: 10 Dec 2021 22:34
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Contributors
Author:
Hiroshi Mizuta
Author:
Yoshishige Tsuchiya
Author:
S Oda
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