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Functional silicon nanoelectronic devices co-integrated with nanoelectromechanical structures

Functional silicon nanoelectronic devices co-integrated with nanoelectromechanical structures
Functional silicon nanoelectronic devices co-integrated with nanoelectromechanical structures
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Oda, S
514339b3-f8de-4750-8d20-c520834b2477
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Oda, S
514339b3-f8de-4750-8d20-c520834b2477

Mizuta, Hiroshi, Tsuchiya, Yoshishige and Oda, S (2009) Functional silicon nanoelectronic devices co-integrated with nanoelectromechanical structures. JSAP Symposium on Development of Neosilicon for 'More-than'Moore' Era, Toyama.

Record type: Conference or Workshop Item (Other)

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More information

Published date: 10 September 2009
Venue - Dates: JSAP Symposium on Development of Neosilicon for 'More-than'Moore' Era, Toyama, 2009-09-09
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 267624
URI: http://eprints.soton.ac.uk/id/eprint/267624
PURE UUID: bf148bcd-847d-41f2-a1bd-7c1d8b83ddb7

Catalogue record

Date deposited: 26 Jun 2009 17:06
Last modified: 08 Nov 2021 21:40

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Contributors

Author: Hiroshi Mizuta
Author: Yoshishige Tsuchiya
Author: S Oda

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