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Design and Analysis of an In-Plane Resonant Nano-Electro-Mechanical Sensor for Sub-Attogram-Level Molecular Mass-Detection

Design and Analysis of an In-Plane Resonant Nano-Electro-Mechanical Sensor for Sub-Attogram-Level Molecular Mass-Detection
Design and Analysis of an In-Plane Resonant Nano-Electro-Mechanical Sensor for Sub-Attogram-Level Molecular Mass-Detection
This paper presents the In-Plane Resonant NEM (IP R-NEM) sensor based on the mass-detection principle. The proposed sensor features a mass-detection limit of sub atto gram and the sensitivity of the order of zepto gram/Hz, more than eight orders smaller than that of recent QCM-based sensors. The sensor is designed and analyzed using the three-dimensional FEM simulation. Self-assembled linker molecules and adsorbed target molecules on the beam surface are modelled by adding an extra surface coating layer. We study two different surface detection schemes, top-and-bottom and all-around surface detection. The IP R-NEM sensor is integrated with a MOSFET for electrical detection, and the transient response is studied on the system-level using a hybrid electro-mechanical circuit simulation.
Hassani, F.A
b91a55de-f741-46d9-9a00-4bd07a06c58f
Cobianu, C
29db95c0-5a08-455a-9c58-734aca0ea6ec
Armini, S
4c215fe1-646a-448a-8eb5-0cfc32e61987
Petrescu, V
19be5854-6491-48aa-9d32-1b72bc39f034
Merken, P
e44aef20-8d5b-46c6-8c1d-db9a899d84af
Tsamados, D
b2399642-5229-40e8-9821-460a5377437e
Ionescu, A.M
be9e68d3-9ac7-4ddb-beda-ddac0578e8ec
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Hassani, F.A
b91a55de-f741-46d9-9a00-4bd07a06c58f
Cobianu, C
29db95c0-5a08-455a-9c58-734aca0ea6ec
Armini, S
4c215fe1-646a-448a-8eb5-0cfc32e61987
Petrescu, V
19be5854-6491-48aa-9d32-1b72bc39f034
Merken, P
e44aef20-8d5b-46c6-8c1d-db9a899d84af
Tsamados, D
b2399642-5229-40e8-9821-460a5377437e
Ionescu, A.M
be9e68d3-9ac7-4ddb-beda-ddac0578e8ec
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9

Hassani, F.A, Cobianu, C, Armini, S, Petrescu, V, Merken, P, Tsamados, D, Ionescu, A.M, Tsuchiya, Yoshishige and Mizuta, Hiroshi (2009) Design and Analysis of an In-Plane Resonant Nano-Electro-Mechanical Sensor for Sub-Attogram-Level Molecular Mass-Detection. 41st International Conference on Solid State Devices and Materials (SSDM2009), Sendai.

Record type: Conference or Workshop Item (Paper)

Abstract

This paper presents the In-Plane Resonant NEM (IP R-NEM) sensor based on the mass-detection principle. The proposed sensor features a mass-detection limit of sub atto gram and the sensitivity of the order of zepto gram/Hz, more than eight orders smaller than that of recent QCM-based sensors. The sensor is designed and analyzed using the three-dimensional FEM simulation. Self-assembled linker molecules and adsorbed target molecules on the beam surface are modelled by adding an extra surface coating layer. We study two different surface detection schemes, top-and-bottom and all-around surface detection. The IP R-NEM sensor is integrated with a MOSFET for electrical detection, and the transient response is studied on the system-level using a hybrid electro-mechanical circuit simulation.

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More information

Published date: 9 October 2009
Additional Information: Event Dates: 7-9 October
Venue - Dates: 41st International Conference on Solid State Devices and Materials (SSDM2009), Sendai, 2009-10-08
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 267682
URI: http://eprints.soton.ac.uk/id/eprint/267682
PURE UUID: 848006f3-d293-47a5-826b-e4320f8ddc44

Catalogue record

Date deposited: 19 Jul 2009 13:25
Last modified: 08 Nov 2021 21:41

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Contributors

Author: F.A Hassani
Author: C Cobianu
Author: S Armini
Author: V Petrescu
Author: P Merken
Author: D Tsamados
Author: A.M Ionescu
Author: Yoshishige Tsuchiya
Author: Hiroshi Mizuta

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