Fabrication and characterization of free-standing thick-film piezoelectric cantilevers for energy harvesting

Abstract

Research into energy harvesting from ambient vibration sources has attracted great interest over the last few years, largely as a result of advances in the areas of wireless technology and low power electronics. One of the mechanisms for converting mechanical vibration to electrical energy is the use of piezoelectric materials, typically operating as a cantilever in a bending mode, which generate a voltage across the electrodes when they are stressed. Typically, the piezoelectric materials are deposited on a non-electro-active substrate and are physically clamped at one end to a rigid base. The presence of the substrate does not contribute directly to the electrical output, but merely serves as a mechanical supporting platform, which can pose difficulties for integration with other microelectronic devices. The aim of this paper is to describe a novel thick-film free-standing cantilever structure that does not use a supporting platform and has the advantage of minimising the movement constraints on the piezoelectric material, thereby maximising the electrical output power. Two configurations of composite cantilever structure were investigated; unimorph and multimorph. A unimorph consists of a pair of silver/palladium (Ag/Pd) electrodes sandwiching a laminar layer of lead zirconate titanate (PZT). A multimorph is an extended version of the unimorph with two pairs of Ag/Pd electrodes and three laminar sections of PZT.

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Identifiers

ORCID for Neil White: orcid.org/0000-0003-1532-6452

ORCID for Nick Harris: orcid.org/0000-0003-4122-2219

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