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Fabrication and characterization of free-standing thick-film piezoelectric cantilevers for energy harvesting

Fabrication and characterization of free-standing thick-film piezoelectric cantilevers for energy harvesting
Fabrication and characterization of free-standing thick-film piezoelectric cantilevers for energy harvesting
Research into energy harvesting from ambient vibration sources has attracted great interest over the last few years, largely as a result of advances in the areas of wireless technology and low power electronics. One of the mechanisms for converting mechanical vibration to electrical energy is the use of piezoelectric materials, typically operating as a cantilever in a bending mode, which generate a voltage across the electrodes when they are stressed. Typically, the piezoelectric materials are deposited on a non-electro-active substrate and are physically clamped at one end to a rigid base. The presence of the substrate does not contribute directly to the electrical output, but merely serves as a mechanical supporting platform, which can pose difficulties for integration with other microelectronic devices. The aim of this paper is to describe a novel thick-film free-standing cantilever structure that does not use a supporting platform and has the advantage of minimising the movement constraints on the piezoelectric material, thereby maximising the electrical output power. Two configurations of composite cantilever structure were investigated; unimorph and multimorph. A unimorph consists of a pair of silver/palladium (Ag/Pd) electrodes sandwiching a laminar layer of lead zirconate titanate (PZT). A multimorph is an extended version of the unimorph with two pairs of Ag/Pd electrodes and three laminar sections of PZT.
1361-6501
1-14
Kok, Swee Leong
cd2530f7-f6db-4f6b-956e-906c5d559216
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Harris, Nick
237cfdbd-86e4-4025-869c-c85136f14dfd
Kok, Swee Leong
cd2530f7-f6db-4f6b-956e-906c5d559216
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Harris, Nick
237cfdbd-86e4-4025-869c-c85136f14dfd

Kok, Swee Leong, White, Neil and Harris, Nick (2009) Fabrication and characterization of free-standing thick-film piezoelectric cantilevers for energy harvesting. Measurement Science and Technology, 20 (12), 1-14, [124010]. (doi:10.1088/0957-0233/20/12/124010).

Record type: Article

Abstract

Research into energy harvesting from ambient vibration sources has attracted great interest over the last few years, largely as a result of advances in the areas of wireless technology and low power electronics. One of the mechanisms for converting mechanical vibration to electrical energy is the use of piezoelectric materials, typically operating as a cantilever in a bending mode, which generate a voltage across the electrodes when they are stressed. Typically, the piezoelectric materials are deposited on a non-electro-active substrate and are physically clamped at one end to a rigid base. The presence of the substrate does not contribute directly to the electrical output, but merely serves as a mechanical supporting platform, which can pose difficulties for integration with other microelectronic devices. The aim of this paper is to describe a novel thick-film free-standing cantilever structure that does not use a supporting platform and has the advantage of minimising the movement constraints on the piezoelectric material, thereby maximising the electrical output power. Two configurations of composite cantilever structure were investigated; unimorph and multimorph. A unimorph consists of a pair of silver/palladium (Ag/Pd) electrodes sandwiching a laminar layer of lead zirconate titanate (PZT). A multimorph is an extended version of the unimorph with two pairs of Ag/Pd electrodes and three laminar sections of PZT.

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Published date: 2009
Organisations: EEE

Identifiers

Local EPrints ID: 267965
URI: http://eprints.soton.ac.uk/id/eprint/267965
ISSN: 1361-6501
PURE UUID: 39221a48-29f1-48ed-9ece-8bfabb29b813
ORCID for Neil White: ORCID iD orcid.org/0000-0003-1532-6452
ORCID for Nick Harris: ORCID iD orcid.org/0000-0003-4122-2219

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Date deposited: 28 Sep 2009 14:18
Last modified: 17 Dec 2019 02:02

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