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Design and Analysis of an In-Plane Resonant Nano-Electro-Mechanical Sensor for Sub-Attogram-Level Molecular Mass-Detection

Record type: Conference or Workshop Item (Paper)

This paper presents the In-Plane Resonant NEM (IP R-NEM) sensor based on the mass-detection principle. The proposed sensor features a mass-detection limit of sub atto gram and the sensitivity of the order of zepto gram/Hz, more than eight orders smaller than that of recent QCM-based sensors. The sensor is designed and analyzed using the three-dimensional FEM simulation. Self-assembled linker molecules and adsorbed target molecules on the beam surface are modelled by adding an extra surface coating layer. We study two different surface detection schemes, top-and-bottom and all-around surface detection. The IP R-NEM sensor is integrated with a MOSFET for electrical detection, and the transient response is studied on the system-level using a hybrid electro-mechanical circuit simulation.

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Citation

Arab Hassani, Faezeh, Cobianu, Cornel, Armini, Silvia, Petrescu, Violeta, Merken, Patrick, Tsamados, Dimitrios, M. Ionescu, Adrian, Tsuchiya, Yoshishige and Mizuta, Hiroshi (2009) Design and Analysis of an In-Plane Resonant Nano-Electro-Mechanical Sensor for Sub-Attogram-Level Molecular Mass-Detection At 2009 International Conference on Solid State Devices and Materials (SSDM 2009), Japan. 07 - 09 Oct 2009.

More information

Published date: October 2009
Additional Information: Event Dates: 7-9 October
Venue - Dates: 2009 International Conference on Solid State Devices and Materials (SSDM 2009), Japan, 2009-10-07 - 2009-10-09
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 268045
URI: http://eprints.soton.ac.uk/id/eprint/268045
PURE UUID: e0772999-d7f3-4c34-a42b-81efa047aed2

Catalogue record

Date deposited: 13 Oct 2009 15:23
Last modified: 18 Jul 2017 06:57

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Contributors

Author: Faezeh Arab Hassani
Author: Cornel Cobianu
Author: Silvia Armini
Author: Violeta Petrescu
Author: Patrick Merken
Author: Dimitrios Tsamados
Author: Adrian M. Ionescu
Author: Yoshishige Tsuchiya
Author: Hiroshi Mizuta

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