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Using a Helium Ion Microscope in a Clean Room Environment

Using a Helium Ion Microscope in a Clean Room Environment
Using a Helium Ion Microscope in a Clean Room Environment
The Zeiss 'Orion' helium ion microscope has improved resolution and sample interaction mechanisms as compared to a standard SEM. To fully realize the potential of the device in the new Southampton Nanofabrication Centre it was installed in a class 1000 area co-sited with a FIB and adjacent to the high resolution e-beam class 100 facility and extensive lithography and layer deposition tools. Achieving an adequate acoustic environment has required numerous modifications to the clean room infrastructure. The paper provides details of our multi-facetted, clean room compatible approach to resolving these multiple practical issues.
Rutt, H.N.
e09fa327-0c01-467a-9898-4e7f0cd715fc
Rutt, H.N.
e09fa327-0c01-467a-9898-4e7f0cd715fc

Rutt, H.N. (2009) Using a Helium Ion Microscope in a Clean Room Environment. SPIE Scanning Microscopy 2010, United States. 17 - 19 May 2010.

Record type: Conference or Workshop Item (Other)

Abstract

The Zeiss 'Orion' helium ion microscope has improved resolution and sample interaction mechanisms as compared to a standard SEM. To fully realize the potential of the device in the new Southampton Nanofabrication Centre it was installed in a class 1000 area co-sited with a FIB and adjacent to the high resolution e-beam class 100 facility and extensive lithography and layer deposition tools. Achieving an adequate acoustic environment has required numerous modifications to the clean room infrastructure. The paper provides details of our multi-facetted, clean room compatible approach to resolving these multiple practical issues.

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Submitted date: 14 December 2009
Additional Information: Abstract Ref SG10-SG101-50 Event Dates: 17-19 May 2010
Venue - Dates: SPIE Scanning Microscopy 2010, United States, 2010-05-17 - 2010-05-19
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 268319
URI: http://eprints.soton.ac.uk/id/eprint/268319
PURE UUID: 92202734-acf7-4a7d-a610-c5f98c164108

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Date deposited: 16 Dec 2009 10:36
Last modified: 24 Jul 2017 16:40

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