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Design and fabrication of a micromachined electrostatically suspended gyroscope

Design and fabrication of a micromachined electrostatically suspended gyroscope
Design and fabrication of a micromachined electrostatically suspended gyroscope
The current paper describes the design and fabrication of a micromachined electrostatically suspended gyroscope. Electrostatic levitation is employed to suspend the rotor, eliminating the mechanical bearing and thus friction effects between the rotor and the substrate, hence improving long-term stability. The rate of rotation can be measured by detecting the torque-induced displacement of the spinning rotor using capacitive interface circuits. The device structure and its basic operating principle are described, as well as theoretical background and design considerations. The fabrication process of the gyroscope relies on glass/silicon/glass stack bonding and deep dry etching and is outlined in detail. Initial prototypes realized with this fabrication process are presented and described.
53-63
Damrongsak, B
3b962ddf-7302-45cb-9b73-a67eb070ce49
Kraft, M
54927621-738f-4d40-af56-a027f686b59f
Rajgopal, S
6a6e571f-5590-4350-bc17-d08dac64f83c
Mehregany, M
ddc1c91d-9250-4342-983c-fabfacdc366f
Damrongsak, B
3b962ddf-7302-45cb-9b73-a67eb070ce49
Kraft, M
54927621-738f-4d40-af56-a027f686b59f
Rajgopal, S
6a6e571f-5590-4350-bc17-d08dac64f83c
Mehregany, M
ddc1c91d-9250-4342-983c-fabfacdc366f

Damrongsak, B, Kraft, M, Rajgopal, S and Mehregany, M (2008) Design and fabrication of a micromachined electrostatically suspended gyroscope. PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNALOF MECHANICAL ENGINEERING SCIENCE, 222, 53-63.

Record type: Article

Abstract

The current paper describes the design and fabrication of a micromachined electrostatically suspended gyroscope. Electrostatic levitation is employed to suspend the rotor, eliminating the mechanical bearing and thus friction effects between the rotor and the substrate, hence improving long-term stability. The rate of rotation can be measured by detecting the torque-induced displacement of the spinning rotor using capacitive interface circuits. The device structure and its basic operating principle are described, as well as theoretical background and design considerations. The fabrication process of the gyroscope relies on glass/silicon/glass stack bonding and deep dry etching and is outlined in detail. Initial prototypes realized with this fabrication process are presented and described.

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IMechE_Special_Issue_LevDisk_2008.pdf - Other
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More information

Published date: 2008
Additional Information: Imported from ISI Web of Science
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 269142
URI: https://eprints.soton.ac.uk/id/eprint/269142
PURE UUID: 99858869-3a41-4b2a-8053-5eafa4a1f340

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Date deposited: 21 Apr 2010 07:46
Last modified: 11 Nov 2019 21:05

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