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Analysis of sense finger dynamics for accurate ΣΔ MEMS accelerometer modelling in VHDL-AMS

Analysis of sense finger dynamics for accurate ΣΔ MEMS accelerometer modelling in VHDL-AMS
Analysis of sense finger dynamics for accurate ΣΔ MEMS accelerometer modelling in VHDL-AMS
The sense finger dynamics in the capacitive MEMS accelerometer affect the performance of electromechanical mixed-domain Sigma-Delta control loop. Correct behaviour can not be correctly predicted by conventional lumped model of the mechanical sensing element. This contribution presents an improved distributed mechanical model implemented in VHDL-AMS and detailed analysis of how sense finger dynamics affect the operation of the accelerometer when the system is subjected by jolt and step excitations. Such excitations are common in typical MEMS accelerometer applications in automobile safety systems.
4 pp.-
IEEE
Kazmierski, T.J.
a97d7958-40c3-413f-924d-84545216092a
Kazmierski, T.J.
a97d7958-40c3-413f-924d-84545216092a

Kazmierski, T.J. (2009) Analysis of sense finger dynamics for accurate ΣΔ MEMS accelerometer modelling in VHDL-AMS. In 2009 Forum on Specification & Design Languages (FDL). IEEE. 4 pp.- .

Record type: Conference or Workshop Item (Paper)

Abstract

The sense finger dynamics in the capacitive MEMS accelerometer affect the performance of electromechanical mixed-domain Sigma-Delta control loop. Correct behaviour can not be correctly predicted by conventional lumped model of the mechanical sensing element. This contribution presents an improved distributed mechanical model implemented in VHDL-AMS and detailed analysis of how sense finger dynamics affect the operation of the accelerometer when the system is subjected by jolt and step excitations. Such excitations are common in typical MEMS accelerometer applications in automobile safety systems.

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Published date: 2009
Additional Information: Imported from ISI Web of Science
Organisations: EEE

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Local EPrints ID: 270066
URI: https://eprints.soton.ac.uk/id/eprint/270066
PURE UUID: 626479ac-4313-4f70-aacb-ee20818dd8fa

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Date deposited: 21 Apr 2010 07:46
Last modified: 19 Jul 2019 16:58

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Contributors

Author: T.J. Kazmierski

University divisions

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