A new design methodology for electro-mechanical Sigma-Delta-Modulators
A new design methodology for electro-mechanical Sigma-Delta-Modulators
Sigma-Delta-Modulators (SDM) are the most successful technique for analog-to-digital (A/D) conversion, especially for high resolution applications. Similar techniques and architectures have been applied to micro-electro-mechanical systems (MEMS) by incorporating a micromachined sensing element in a SDM force-feedback loop. However, compared to the design of purely electrical SDM there are important differences due to the integration of the sensing element regarding stability and performance. As a result, there are very few systematic methods for the design of electro-mechanical SDM compared to purely electrical SDM. In this paper, a new systematic design methodology is proposed to realize an electro-mechanical SDM system which is demonstrated at system level for a bulk micromachined, capacitive accelerometer.
881-4
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
2009
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
Kraft, M.
(2009)
A new design methodology for electro-mechanical Sigma-Delta-Modulators.
In 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
IEEE.
.
(doi:10.1109/NEMS.2009.5068715).
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Conference or Workshop Item
(Paper)
Abstract
Sigma-Delta-Modulators (SDM) are the most successful technique for analog-to-digital (A/D) conversion, especially for high resolution applications. Similar techniques and architectures have been applied to micro-electro-mechanical systems (MEMS) by incorporating a micromachined sensing element in a SDM force-feedback loop. However, compared to the design of purely electrical SDM there are important differences due to the integration of the sensing element regarding stability and performance. As a result, there are very few systematic methods for the design of electro-mechanical SDM compared to purely electrical SDM. In this paper, a new systematic design methodology is proposed to realize an electro-mechanical SDM system which is demonstrated at system level for a bulk micromachined, capacitive accelerometer.
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Published date: 2009
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Nanoelectronics and Nanotechnology
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Local EPrints ID: 270110
URI: http://eprints.soton.ac.uk/id/eprint/270110
PURE UUID: 9100194e-7da6-43d9-92b6-cb4448ef64ee
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Date deposited: 21 Apr 2010 07:46
Last modified: 15 Mar 2024 21:48
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M. Kraft
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