The University of Southampton
University of Southampton Institutional Repository

A new design methodology for electro-mechanical Sigma-Delta-Modulators

Kraft, M. (2009) A new design methodology for electro-mechanical Sigma-Delta-Modulators 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2009), 881-4|xxxvi+1119.

Record type: Article


Sigma-Delta-Modulators (SDM) are the most successful technique for analog-to-digital (A/D) conversion, especially for high resolution applications. Similar techniques and architectures have been applied to micro-electro-mechanical systems (MEMS) by incorporating a micromachined sensing element in a SDM force-feedback loop. However, compared to the design of purely electrical SDM there are important differences due to the integration of the sensing element regarding stability and performance. As a result, there are very few systematic methods for the design of electro-mechanical SDM compared to purely electrical SDM. In this paper, a new systematic design methodology is proposed to realize an electro-mechanical SDM system which is demonstrated at system level for a bulk micromachined, capacitive accelerometer.

Full text not available from this repository.

More information

Published date: 2009
Additional Information: Imported from ISI Web of Science
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 270110
PURE UUID: 9100194e-7da6-43d9-92b6-cb4448ef64ee

Catalogue record

Date deposited: 21 Apr 2010 07:46
Last modified: 18 Jul 2017 06:51

Export record


Author: M. Kraft

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton:

ePrints Soton supports OAI 2.0 with a base URL of

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.