A new design methodology for electro-mechanical Sigma-Delta-Modulators

Kraft, M. (2009) A new design methodology for electro-mechanical Sigma-Delta-Modulators 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2009), 881-4|xxxvi+1119.


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Sigma-Delta-Modulators (SDM) are the most successful technique for analog-to-digital (A/D) conversion, especially for high resolution applications. Similar techniques and architectures have been applied to micro-electro-mechanical systems (MEMS) by incorporating a micromachined sensing element in a SDM force-feedback loop. However, compared to the design of purely electrical SDM there are important differences due to the integration of the sensing element regarding stability and performance. As a result, there are very few systematic methods for the design of electro-mechanical SDM compared to purely electrical SDM. In this paper, a new systematic design methodology is proposed to realize an electro-mechanical SDM system which is demonstrated at system level for a bulk micromachined, capacitive accelerometer.

Item Type: Article
Additional Information: Imported from ISI Web of Science
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 270110
Date :
Date Event
Date Deposited: 21 Apr 2010 07:46
Last Modified: 17 Apr 2017 18:29
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/270110

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