Rouabah, HA, Park, BY, Zaouk, RB, Madou, MJ and Green, NG
Producing fluid flow using 3D carbon electrodes - art. no. 012072
ELECTROSTATICS 2007, 142, .
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Moving and manipulating bio-particles and fluids on the microscale is central to many lab-on-a-chip applications. Techniques for pumping fluids which use electric fields have shown promise using both DC and AC voltages. AC techniques, however, require the use of integrated metal electrodes which have a low resistance but can suffer from unwanted chemical reactions even at low potentials. In this paper we introduce the use of carbon MEMS technology (C-MEMS), a fabrication method which produces 3D conductive polymeric structures. Results are presented of the fabrication of an innovative design of 3D AC-electroosmotic micropump and preliminary experimental measurements which demonstrate the potential of both the technology and the design.
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||Nanoelectronics and Nanotechnology
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