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Nano-scale resonant sensors for gas and bio detection: expectations and challenges

Nano-scale resonant sensors for gas and bio detection: expectations and challenges
Nano-scale resonant sensors for gas and bio detection: expectations and challenges
It is the purpose of this paper to show expectations, challenges and initial steps concerning the realization of resonant chemical NEMS sensors able to meet the needs of future applications. Here, we focus on the functionalization principles of the sensing Self-Assembled Monolayer (SAM), modeling and simulation of CMOS-SOI resonant NEMS sensor with electrostatic actuation and MOSFET detection, first CMOS-SOI experimental results for making Si nano wire for piezoresistive detection schemes, noise limits of the resonant nano-sensors, challenges for the design of the on-chip readout circuitry, and the specific reliability issues of resonant NEMS. Some of the simulated sensitivity results of about 5 Hz/zg at 433 MHz and MOSFET detection are close to the best state- of- art experimental data from literature of 0.7 Hz/zg at 127 MHz. It is our challenge to pursuit at experimental level with our nanosensor concepts for making reliable nanodevices addressing the needs of integrated sensing.
259-262
IEEE
Cobianu, C.
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Serban, B.
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Mihaila, M.
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Dumitru, V.
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Hassani, F.A.
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Tsuchiya, Y.
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Mizuta, H.
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Cherman, V.
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De Wolf, I.
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Petrescu, V.
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Santana, J.
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Dupre, C.
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Ollier, E.
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Ernst, T.
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Andreucci, P.
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Duraffourg, L.
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Tsamados, D.
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Ionescu, A.M.
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Cobianu, C.
2470c9af-d683-477a-b2a1-a262bb015668
Serban, B.
d81c3d38-3d6e-4bf8-8859-fb511d193526
Mihaila, M.
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Dumitru, V.
843e9cf7-38a3-4166-aa64-866ef4bf19b8
Hassani, F.A.
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Tsuchiya, Y.
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Mizuta, H.
f14d5ffc-751b-472b-8dba-c8518c6840b9
Cherman, V.
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De Wolf, I.
5d80e97e-4422-4b3e-a172-c54aeffc2b61
Petrescu, V.
c3815408-78bc-4088-a087-887ae5ebacc3
Santana, J.
2ba9a9eb-c4b9-41ce-b1c7-08559dd9dbeb
Dupre, C.
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Ollier, E.
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Ernst, T.
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Andreucci, P.
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Duraffourg, L.
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Tsamados, D.
cd71bac4-9b11-4099-9256-310f4a2b37b2
Ionescu, A.M.
1cf251ae-6696-4f1d-8f51-8bc87e342b3b

Cobianu, C., Serban, B., Mihaila, M., Dumitru, V., Hassani, F.A., Tsuchiya, Y., Mizuta, H., Cherman, V., De Wolf, I., Petrescu, V., Santana, J., Dupre, C., Ollier, E., Ernst, T., Andreucci, P., Duraffourg, L., Tsamados, D. and Ionescu, A.M. (2009) Nano-scale resonant sensors for gas and bio detection: expectations and challenges. In 2009 International Semiconductor Conference. IEEE. pp. 259-262 . (doi:10.1109/SMICND.2009.5336553).

Record type: Conference or Workshop Item (Paper)

Abstract

It is the purpose of this paper to show expectations, challenges and initial steps concerning the realization of resonant chemical NEMS sensors able to meet the needs of future applications. Here, we focus on the functionalization principles of the sensing Self-Assembled Monolayer (SAM), modeling and simulation of CMOS-SOI resonant NEMS sensor with electrostatic actuation and MOSFET detection, first CMOS-SOI experimental results for making Si nano wire for piezoresistive detection schemes, noise limits of the resonant nano-sensors, challenges for the design of the on-chip readout circuitry, and the specific reliability issues of resonant NEMS. Some of the simulated sensitivity results of about 5 Hz/zg at 433 MHz and MOSFET detection are close to the best state- of- art experimental data from literature of 0.7 Hz/zg at 127 MHz. It is our challenge to pursuit at experimental level with our nanosensor concepts for making reliable nanodevices addressing the needs of integrated sensing.

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More information

Published date: 2009
Venue - Dates: Proceedings of the 2009 32nd International Semiconductor Conference. CAS 2009, 2009-01-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 270360
URI: https://eprints.soton.ac.uk/id/eprint/270360
PURE UUID: 6aab14c1-7614-4df3-bfbf-d4c67363f331

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Date deposited: 21 Apr 2010 07:46
Last modified: 05 Dec 2018 17:31

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Contributors

Author: C. Cobianu
Author: B. Serban
Author: M. Mihaila
Author: V. Dumitru
Author: F.A. Hassani
Author: Y. Tsuchiya
Author: H. Mizuta
Author: V. Cherman
Author: I. De Wolf
Author: V. Petrescu
Author: J. Santana
Author: C. Dupre
Author: E. Ollier
Author: T. Ernst
Author: P. Andreucci
Author: L. Duraffourg
Author: D. Tsamados
Author: A.M. Ionescu

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