The University of Southampton
University of Southampton Institutional Repository

Nano-scale resonant sensors for gas and bio detection: expectations and challenges

Record type: Article

It is the purpose of this paper to show expectations, challenges and initial steps concerning the realization of resonant chemical NEMS sensors able to meet the needs of future applications. Here, we focus on the functionalization principles of the sensing Self-Assembled Monolayer (SAM), modeling and simulation of CMOS-SOI resonant NEMS sensor with electrostatic actuation and MOSFET detection, first CMOS-SOI experimental results for making Si nano wire for piezoresistive detection schemes, noise limits of the resonant nano-sensors, challenges for the design of the on-chip readout circuitry, and the specific reliability issues of resonant NEMS. Some of the simulated sensitivity results of about 5 Hz/zg at 433 MHz and MOSFET detection are close to the best state- of- art experimental data from literature of 0.7 Hz/zg at 127 MHz. It is our challenge to pursuit at experimental level with our nanosensor concepts for making reliable nanodevices addressing the needs of integrated sensing.

Full text not available from this repository.

Citation

Cobianu, C., Serban, B., Mihaila, M., Dumitru, V., Hassani, F.A., Tsuchiya, Y., Mizuta, H., Cherman, V., De Wolf, I., Petrescu, V., Santana, J., Dupre, C., Ollier, E., Ernst, T., Andreucci, P., Duraffourg, L., Tsamados, D. and Ionescu, A.M. (2009) Nano-scale resonant sensors for gas and bio detection: expectations and challenges Proceedings of the 2009 32nd International Semiconductor Conference. CAS 2009, pp. 259-62.

More information

Published date: 2009
Additional Information: Imported from ISI Web of Science
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 270360
URI: http://eprints.soton.ac.uk/id/eprint/270360
PURE UUID: 6aab14c1-7614-4df3-bfbf-d4c67363f331

Catalogue record

Date deposited: 21 Apr 2010 07:46
Last modified: 18 Jul 2017 06:51

Export record

Contributors

Author: C. Cobianu
Author: B. Serban
Author: M. Mihaila
Author: V. Dumitru
Author: F.A. Hassani
Author: Y. Tsuchiya
Author: H. Mizuta
Author: V. Cherman
Author: I. De Wolf
Author: V. Petrescu
Author: J. Santana
Author: C. Dupre
Author: E. Ollier
Author: T. Ernst
Author: P. Andreucci
Author: L. Duraffourg
Author: D. Tsamados
Author: A.M. Ionescu

University divisions


Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×