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A high resolution silicon-on-glass Z Axis Gyroscope Operating at Atmospheric Pressure

A high resolution silicon-on-glass Z Axis Gyroscope Operating at Atmospheric Pressure
A high resolution silicon-on-glass Z Axis Gyroscope Operating at Atmospheric Pressure
This paper describes a high-resolution silicon-on-glass z axis gyroscope operating at atmospheric pressure. The mechanical structure is designed in such a way that it exhibits low cross coupling between drive and sense mode of less than 0.5% simulated using finite-element method and 1.35% verified by experimental measurements. Due to a symmetrically designed structure, the specified bandwidth can be maintained despite of fabrication imperfections. The fabrication process flow is based on a combination of silicon on glass bonding and deep reactive ion etching which results in a large proof mass and capacitances. A closed loop self-oscillation drive interface is used to resonate the gyroscope in the drive mode, which reaches steady-state after 150 ms. Using area-varying capacitors, large quality factors of 217 and 97 for drive and sense mode, respectively, were achieved operating at atmospheric pressure. A low drive voltage, with a 1 Vpeak-peak AC drive amplitude and 10 V DC bias was used to excite the drive mode. The measured scale factor was 10.7 mV/º/s in a range of ±300 º/s with a R2-nonlinearity of 0.12%. The noise equivalent angular rate is 0.0015 º/s/Hz1/2 (=5.4 º/h/Hz1/2) in a 50 Hz bandwidth. The measured SNR was 34 dB at an angular rate input signal with an amplitude of 12.5 º/ s and a frequency of 10 Hz. Without any active temperature control, zero bias stability of 1     was achieved for long-term measurements over six hours and 0.3 º/s for short-term measurements over 120 seconds (1-σ).
1530-437X
1066-1074
Ding, Haitao
de8b02b7-7361-4dc3-ad30-df71be697807
Liu, X
b9b5844e-6141-4535-bbad-48b5abf07d33
Cui, J
cbb0bafe-d7da-4b08-82e8-11fefe6ea1c3
Chi, X
a2523b2b-b35c-4939-92c6-e718d3362ef7
Lin, L
368f4fd3-300e-4009-9e24-30a299fa62e1
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Yang, Z
fc242a1d-f148-4a2a-a431-f00266eb8adb
Yan, G
440e027c-2669-4de7-ae5c-f91c698f40da
Ding, Haitao
de8b02b7-7361-4dc3-ad30-df71be697807
Liu, X
b9b5844e-6141-4535-bbad-48b5abf07d33
Cui, J
cbb0bafe-d7da-4b08-82e8-11fefe6ea1c3
Chi, X
a2523b2b-b35c-4939-92c6-e718d3362ef7
Lin, L
368f4fd3-300e-4009-9e24-30a299fa62e1
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Yang, Z
fc242a1d-f148-4a2a-a431-f00266eb8adb
Yan, G
440e027c-2669-4de7-ae5c-f91c698f40da

Ding, Haitao, Liu, X, Cui, J, Chi, X, Lin, L, Kraft, Michael, Yang, Z and Yan, G (2010) A high resolution silicon-on-glass Z Axis Gyroscope Operating at Atmospheric Pressure. IEEE Sensors Journal, 10 (6), 1066-1074. (Submitted)

Record type: Article

Abstract

This paper describes a high-resolution silicon-on-glass z axis gyroscope operating at atmospheric pressure. The mechanical structure is designed in such a way that it exhibits low cross coupling between drive and sense mode of less than 0.5% simulated using finite-element method and 1.35% verified by experimental measurements. Due to a symmetrically designed structure, the specified bandwidth can be maintained despite of fabrication imperfections. The fabrication process flow is based on a combination of silicon on glass bonding and deep reactive ion etching which results in a large proof mass and capacitances. A closed loop self-oscillation drive interface is used to resonate the gyroscope in the drive mode, which reaches steady-state after 150 ms. Using area-varying capacitors, large quality factors of 217 and 97 for drive and sense mode, respectively, were achieved operating at atmospheric pressure. A low drive voltage, with a 1 Vpeak-peak AC drive amplitude and 10 V DC bias was used to excite the drive mode. The measured scale factor was 10.7 mV/º/s in a range of ±300 º/s with a R2-nonlinearity of 0.12%. The noise equivalent angular rate is 0.0015 º/s/Hz1/2 (=5.4 º/h/Hz1/2) in a 50 Hz bandwidth. The measured SNR was 34 dB at an angular rate input signal with an amplitude of 12.5 º/ s and a frequency of 10 Hz. Without any active temperature control, zero bias stability of 1     was achieved for long-term measurements over six hours and 0.3 º/s for short-term measurements over 120 seconds (1-σ).

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Submitted date: June 2010
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 270886
URI: http://eprints.soton.ac.uk/id/eprint/270886
ISSN: 1530-437X
PURE UUID: 3917ba14-c9ec-4648-94cc-0575ac982a95

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Date deposited: 21 Apr 2010 13:02
Last modified: 30 Jul 2018 16:31

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Contributors

Author: Haitao Ding
Author: X Liu
Author: J Cui
Author: X Chi
Author: L Lin
Author: Michael Kraft
Author: Z Yang
Author: G Yan

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