Characteristic analysis on dynamic response of a micro-actuator
Characteristic analysis on dynamic response of a micro-actuator
Sun, D
41ecda5e-615d-426d-a01b-c7cf46acbf14
Dong, W
035492bb-53d7-4586-8262-9359ca27de93
Liu, C
3f45f2cc-6d0e-4d70-b332-e701056cf400
Wang, G
792f98a8-c5f2-4224-9f2d-21419fdbdbd8
Chen, W
f1e601d4-a49a-4019-9d2a-3bca0830db86
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
2007
Sun, D
41ecda5e-615d-426d-a01b-c7cf46acbf14
Dong, W
035492bb-53d7-4586-8262-9359ca27de93
Liu, C
3f45f2cc-6d0e-4d70-b332-e701056cf400
Wang, G
792f98a8-c5f2-4224-9f2d-21419fdbdbd8
Chen, W
f1e601d4-a49a-4019-9d2a-3bca0830db86
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Sun, D, Dong, W, Liu, C, Wang, G, Chen, W and Kraft, Michael
(2007)
Characteristic analysis on dynamic response of a micro-actuator.
Journal of Microsystem Technologies, 13 (1).
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Published date: 2007
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 270908
URI: http://eprints.soton.ac.uk/id/eprint/270908
PURE UUID: ec305fc6-13d4-4db1-b124-b9c4d17b4cc3
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Date deposited: 22 Apr 2010 13:56
Last modified: 10 Dec 2021 23:13
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Contributors
Author:
D Sun
Author:
W Dong
Author:
C Liu
Author:
G Wang
Author:
W Chen
Author:
Michael Kraft
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