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Development of a low actuation voltage RF MEMS switch

Development of a low actuation voltage RF MEMS switch
Development of a low actuation voltage RF MEMS switch
This paper reports on the design of a novel ultra low actuation voltage, low loss radio frequency micro-electro-mechanical system (RF MEMS) capacitive shunt switch. The concept of the switch relies on a mechanically unconstrained armature actuated over a coplanar waveguide using electrostatic forces. The minimum actuation voltage of the switch is <2V, with an isolation of 40dB and insertion loss <0.7dB at 78GHz.
Kiang, K.S.
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Chong, H. M. H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Hwan, C.J.
ab04fb12-5efc-4376-bfca-54d039123558
Lok, L.B.
b75eb966-e606-43b9-8608-2a3161bbe678
Elgaid, K.
875c76a9-b928-4170-bfb7-a43449bd3c52
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
Kiang, K.S.
fdb609c6-75aa-4893-85c8-8e50edfda7fe
Chong, H. M. H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Hwan, C.J.
ab04fb12-5efc-4376-bfca-54d039123558
Lok, L.B.
b75eb966-e606-43b9-8608-2a3161bbe678
Elgaid, K.
875c76a9-b928-4170-bfb7-a43449bd3c52
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f

Kiang, K.S., Chong, H. M. H., Hwan, C.J., Lok, L.B., Elgaid, K. and Kraft, M. (2008) Development of a low actuation voltage RF MEMS switch. Eurosensors Conference XXVII, Germany. 07 - 10 Sep 2008. 4 pp .

Record type: Conference or Workshop Item (Other)

Abstract

This paper reports on the design of a novel ultra low actuation voltage, low loss radio frequency micro-electro-mechanical system (RF MEMS) capacitive shunt switch. The concept of the switch relies on a mechanically unconstrained armature actuated over a coplanar waveguide using electrostatic forces. The minimum actuation voltage of the switch is <2V, with an isolation of 40dB and insertion loss <0.7dB at 78GHz.

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More information

Published date: 2008
Venue - Dates: Eurosensors Conference XXVII, Germany, 2008-09-07 - 2008-09-10
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 271153
URI: https://eprints.soton.ac.uk/id/eprint/271153
PURE UUID: fb88a206-8078-4e85-a7a5-ae37aec9e36b
ORCID for K.S. Kiang: ORCID iD orcid.org/0000-0002-7326-909X
ORCID for H. M. H. Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 24 May 2010 11:17
Last modified: 06 Jun 2018 12:44

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Contributors

Author: K.S. Kiang ORCID iD
Author: H. M. H. Chong ORCID iD
Author: C.J. Hwan
Author: L.B. Lok
Author: K. Elgaid
Author: M. Kraft

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