The University of Southampton
×
Filter your search:
University of Southampton Institutional Repository

Ion Track Nanolithography for Nanotemplate Fabrication using Thick Cross-Linked PMMA 950 Photoresist

Ion Track Nanolithography for Nanotemplate Fabrication using Thick Cross-Linked PMMA 950 Photoresist
Ion Track Nanolithography for Nanotemplate Fabrication using Thick Cross-Linked PMMA 950 Photoresist
186-187
Koukharenko, Elena
b34ae878-2776-4088-8880-5b2bd4f33ec3
Kuleshova, J
91a18558-d3eb-4f91-9959-a9f7ee05e7e6
Kok, S
c08826de-63f3-4955-be11-36a253cb7840
Tudor, MJ
46eea408-2246-4aa0-8b44-86169ed601ff
O'Connell, D
bf0ca238-85ba-4979-ae09-ea956cbd4e4d
Pike, J
5a5c7c2f-05f9-44a4-a22f-eb921139657b
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Nandhakumar, I
ff96512e-b8bb-41c7-b213-ea21bf82dc61
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Koukharenko, Elena
b34ae878-2776-4088-8880-5b2bd4f33ec3
Kuleshova, J
91a18558-d3eb-4f91-9959-a9f7ee05e7e6
Kok, S
c08826de-63f3-4955-be11-36a253cb7840
Tudor, MJ
46eea408-2246-4aa0-8b44-86169ed601ff
O'Connell, D
bf0ca238-85ba-4979-ae09-ea956cbd4e4d
Pike, J
5a5c7c2f-05f9-44a4-a22f-eb921139657b
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Nandhakumar, I
ff96512e-b8bb-41c7-b213-ea21bf82dc61
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Koukharenko, Elena, Kuleshova, J, Kok, S, Tudor, MJ, O'Connell, D, Pike, J, Beeby, SP, Nandhakumar, I and White, NM (2009) Ion Track Nanolithography for Nanotemplate Fabrication using Thick Cross-Linked PMMA 950 Photoresist. 22nd International Microprocesses and Nanotechnology Conference, Sapporo, Japan. 16 - 19 Nov 2009. pp. 186-187 .

Record type: Conference or Workshop Item (Paper)
Archive
MNC2009.zip - Other
Restricted to Registered users only
Download (4MB)
Request a copy

More information

Published date: 2009
Additional Information: Event Dates: November 16-19
Venue - Dates: 22nd International Microprocesses and Nanotechnology Conference, Sapporo, Japan, 2009-11-16 - 2009-11-19
Organisations: EEE

Identifiers

Local EPrints ID: 271199
URI: http://eprints.soton.ac.uk/id/eprint/271199
PURE UUID: 67b83251-c784-4cc7-9d7e-9a866bafe4e2
ORCID for MJ Tudor: ORCID iD orcid.org/0000-0003-1179-9455
ORCID for SP Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for NM White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 28 May 2010 09:12
Last modified: 15 Mar 2024 02:46

Export record

Contributors

Author: Elena Koukharenko
Author: J Kuleshova
Author: S Kok
Author: MJ Tudor ORCID iD
Author: D O'Connell
Author: J Pike
Author: SP Beeby ORCID iD
Author: I Nandhakumar
Author: NM White ORCID iD

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Library staff additional information
Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×