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Ion Track Nanolithography for Nanotemplate Fabrication using Thick Cross-Linked PMMA 950 Photoresist

Ion Track Nanolithography for Nanotemplate Fabrication using Thick Cross-Linked PMMA 950 Photoresist
Ion Track Nanolithography for Nanotemplate Fabrication using Thick Cross-Linked PMMA 950 Photoresist
186-187
Koukharenko, Elena
b34ae878-2776-4088-8880-5b2bd4f33ec3
Kuleshova, J
91a18558-d3eb-4f91-9959-a9f7ee05e7e6
Kok, S
c08826de-63f3-4955-be11-36a253cb7840
Tudor, MJ
46eea408-2246-4aa0-8b44-86169ed601ff
O'Connell, D
bf0ca238-85ba-4979-ae09-ea956cbd4e4d
Pike, J
5a5c7c2f-05f9-44a4-a22f-eb921139657b
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Nandhakumar, I
ff96512e-b8bb-41c7-b213-ea21bf82dc61
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Koukharenko, Elena
b34ae878-2776-4088-8880-5b2bd4f33ec3
Kuleshova, J
91a18558-d3eb-4f91-9959-a9f7ee05e7e6
Kok, S
c08826de-63f3-4955-be11-36a253cb7840
Tudor, MJ
46eea408-2246-4aa0-8b44-86169ed601ff
O'Connell, D
bf0ca238-85ba-4979-ae09-ea956cbd4e4d
Pike, J
5a5c7c2f-05f9-44a4-a22f-eb921139657b
Beeby, SP
ba565001-2812-4300-89f1-fe5a437ecb0d
Nandhakumar, I
ff96512e-b8bb-41c7-b213-ea21bf82dc61
White, NM
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Koukharenko, Elena, Kuleshova, J, Kok, S, Tudor, MJ, O'Connell, D, Pike, J, Beeby, SP, Nandhakumar, I and White, NM (2009) Ion Track Nanolithography for Nanotemplate Fabrication using Thick Cross-Linked PMMA 950 Photoresist. At 22nd International Microprocesses and Nanotechnology Conference 22nd International Microprocesses and Nanotechnology Conference, Japan. 16 - 19 Nov 2009. pp. 186-187.

Record type: Conference or Workshop Item (Paper)
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More information

Published date: 2009
Additional Information: Event Dates: November 16-19
Venue - Dates: 22nd International Microprocesses and Nanotechnology Conference, Japan, 2009-11-16 - 2009-11-19
Organisations: EEE

Identifiers

Local EPrints ID: 271199
URI: https://eprints.soton.ac.uk/id/eprint/271199
PURE UUID: 67b83251-c784-4cc7-9d7e-9a866bafe4e2
ORCID for SP Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for NM White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 28 May 2010 09:12
Last modified: 06 Jun 2018 13:12

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