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AUTOMATED PERFORMANCE OPTIMISATION AND LAYOUT SYNTHESIS OF MEMS ACCELEROMETER WITH SIGMA-DELTA FORCE-FEEDBACK CONTROL LOOP

Record type: Conference or Workshop Item (Other)

This contribution presents a novel methodology for automated optimal design of a MEMS accelerometer with Sigma-Delta force-feedback control loop from user defined high-level performance specifications and design constraints. The proposed approach is based on a simulationbased optimization technology using a genetic algorithm. The layout of the mechanical sensing element is generated simultaneously with the optimal design parameters of the Sigma-Delta control loop. As currently available implementations of AMS HDL languages are not suitable for complex mixed-technology system optimisation, the algorithm as well as aa fast dedicated sigma-delta accelerometer simulator have been implemented in C++. The underlying accelerometer model includes the sense finger dynamics described by a partial differential equation, which enables accurate performance prediction of the sensing element embedded in a in mixed-technology control loop.

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Citation

Zhao, Chenxu and Kazmierski, T.J. (2008) AUTOMATED PERFORMANCE OPTIMISATION AND LAYOUT SYNTHESIS OF MEMS ACCELEROMETER WITH SIGMA-DELTA FORCE-FEEDBACK CONTROL LOOP At 2008 IEEE International Behavioral Modeling and Simulation Workshop.

More information

Published date: 2008
Venue - Dates: 2008 IEEE International Behavioral Modeling and Simulation Workshop, 2008-01-01
Organisations: Electronics & Computer Science

Identifiers

Local EPrints ID: 271336
URI: http://eprints.soton.ac.uk/id/eprint/271336
PURE UUID: 18d5411d-0e0a-4e35-acf7-7159d00fb432

Catalogue record

Date deposited: 05 Jul 2010 09:54
Last modified: 18 Jul 2017 06:44

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Contributors

Author: Chenxu Zhao
Author: T.J. Kazmierski

University divisions


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