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Analysis of sense finger dynamics for accurate ?? MEMS accelerometer modelling in VHDL-AMS

Analysis of sense finger dynamics for accurate ?? MEMS accelerometer modelling in VHDL-AMS
Analysis of sense finger dynamics for accurate ?? MEMS accelerometer modelling in VHDL-AMS
The sense finger dynamics in the capacitive MEMS accelerometer affect the performance of electromechanical mixed-domain Sigma-Delta control loop. Correct behaviour can not be correctly predicted by conventional lumped model of the mechanical sensing element. This contribution presents an improved distributed mechanical model implemented in VHDL-AMS and detailed analysis of how sense finger dynamics affect the operation of the accelerometer when the system is subjected by jolt and step excitations. Such excitations are common in typical MEMS accelerometer applications in automobile safety systems.
Zhao, Chenxu
87d1aa10-ef41-44bc-8969-82626aa1dd92
Kazmierski, Tom
a97d7958-40c3-413f-924d-84545216092a
Zhao, Chenxu
87d1aa10-ef41-44bc-8969-82626aa1dd92
Kazmierski, Tom
a97d7958-40c3-413f-924d-84545216092a

Zhao, Chenxu and Kazmierski, Tom (2009) Analysis of sense finger dynamics for accurate ?? MEMS accelerometer modelling in VHDL-AMS. 2009 Forum on Specification & Design Languages (FDL 2009).

Record type: Conference or Workshop Item (Poster)

Abstract

The sense finger dynamics in the capacitive MEMS accelerometer affect the performance of electromechanical mixed-domain Sigma-Delta control loop. Correct behaviour can not be correctly predicted by conventional lumped model of the mechanical sensing element. This contribution presents an improved distributed mechanical model implemented in VHDL-AMS and detailed analysis of how sense finger dynamics affect the operation of the accelerometer when the system is subjected by jolt and step excitations. Such excitations are common in typical MEMS accelerometer applications in automobile safety systems.

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Published date: 2009
Venue - Dates: 2009 Forum on Specification & Design Languages (FDL 2009), 2009-01-01
Organisations: EEE

Identifiers

Local EPrints ID: 271338
URI: https://eprints.soton.ac.uk/id/eprint/271338
PURE UUID: 17fb8d4e-953a-45a1-b55a-4bd54ae896a3

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Date deposited: 05 Jul 2010 10:11
Last modified: 18 Jul 2017 06:44

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Contributors

Author: Chenxu Zhao
Author: Tom Kazmierski

University divisions

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