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An automated design flow for MEMS accelerometers with Sigma-Delta control

An automated design flow for MEMS accelerometers with Sigma-Delta control
An automated design flow for MEMS accelerometers with Sigma-Delta control
This contribution presents a novel methodology for automated optimal design of MEMS accelerometers embedded in electronic control circuitry from user defined high-level performance specifications and design constraints. The proposed approach is based on simulation-based optimisation where automated configuration selection for electronic blocks and synthesis of mechanical layouts are coupled with calculations of optimal design parameters. The underlying dedicated MEMS simulator supports distributed mechanical dynamics to enable accurate performance prediction of critical mechanical components, such as acceleration sensing elements which form an essential part of the mixed-technology control loop.
Zhao, Chenxu
87d1aa10-ef41-44bc-8969-82626aa1dd92
Kazmierski, Tom
a97d7958-40c3-413f-924d-84545216092a
Zhao, Chenxu
87d1aa10-ef41-44bc-8969-82626aa1dd92
Kazmierski, Tom
a97d7958-40c3-413f-924d-84545216092a

Zhao, Chenxu and Kazmierski, Tom (2010) An automated design flow for MEMS accelerometers with Sigma-Delta control. ICIA 2010.

Record type: Conference or Workshop Item (Other)

Abstract

This contribution presents a novel methodology for automated optimal design of MEMS accelerometers embedded in electronic control circuitry from user defined high-level performance specifications and design constraints. The proposed approach is based on simulation-based optimisation where automated configuration selection for electronic blocks and synthesis of mechanical layouts are coupled with calculations of optimal design parameters. The underlying dedicated MEMS simulator supports distributed mechanical dynamics to enable accurate performance prediction of critical mechanical components, such as acceleration sensing elements which form an essential part of the mixed-technology control loop.

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More information

Published date: June 2010
Venue - Dates: ICIA 2010, 2010-06-01
Organisations: EEE

Identifiers

Local EPrints ID: 271341
URI: https://eprints.soton.ac.uk/id/eprint/271341
PURE UUID: bcadf76f-93d0-4f3e-8213-35a0bbbb40b1

Catalogue record

Date deposited: 05 Jul 2010 10:31
Last modified: 16 Jul 2019 22:18

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Contributors

Author: Chenxu Zhao
Author: Tom Kazmierski

University divisions

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