A Holistic Approach to Automated Synthesis of Mixed-technology Digital MEMS Sensors Part 1: Layout Synthesis of MEMS Component with Distributed Mechanical Dynamics

Zhao, Chenxu and Kazmierski, Tom (2010) A Holistic Approach to Automated Synthesis of Mixed-technology Digital MEMS Sensors Part 1: Layout Synthesis of MEMS Component with Distributed Mechanical Dynamics. Sensors & Transducers, 117, 1-15.

Abstract

This contribution presents a novel, holistic methodology for automated optimal layout synthesis of MEMS systems embedded in electronic control circuitry from user-defined high-level performance specifications and design constraints. The proposed approach is based on simulation-based optimization where the genetic-based synthesis of both mechanical layouts and associated electronic control loops is coupled with calculations of optimal design parameters. The underlying MEMS models include distributed mechanical dynamics described by partial differential equations to enable accurate performance prediction of critical mechanical components. The proposed genetic-based synthesis technique has been implemented in SystemC-A and named SystemC-AGNES. A practical case study of an automated design of a capacitive MEMS accelerometer with Sigma-Delta control demonstrates the operation of the SystemC-AGNES platform. This Part 1 of the paper focuses on the layout synthesis of mechanical components, while the full synthesis methodology including automated and optimal electronic control loop synthesis is outlined in Part 2.

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