The University of Southampton
University of Southampton Institutional Repository

A Holistic Approach to Automated Synthesis of Mixed-technology Digital MEMS Sensors Part 1: Layout Synthesis of MEMS Component with Distributed Mechanical Dynamics

A Holistic Approach to Automated Synthesis of Mixed-technology Digital MEMS Sensors Part 1: Layout Synthesis of MEMS Component with Distributed Mechanical Dynamics
A Holistic Approach to Automated Synthesis of Mixed-technology Digital MEMS Sensors Part 1: Layout Synthesis of MEMS Component with Distributed Mechanical Dynamics
This contribution presents a novel, holistic methodology for automated optimal layout synthesis of MEMS systems embedded in electronic control circuitry from user-defined high-level performance specifications and design constraints. The proposed approach is based on simulation-based optimization where the genetic-based synthesis of both mechanical layouts and associated electronic control loops is coupled with calculations of optimal design parameters. The underlying MEMS models include distributed mechanical dynamics described by partial differential equations to enable accurate performance prediction of critical mechanical components. The proposed genetic-based synthesis technique has been implemented in SystemC-A and named SystemC-AGNES. A practical case study of an automated design of a capacitive MEMS accelerometer with Sigma-Delta control demonstrates the operation of the SystemC-AGNES platform. This Part 1 of the paper focuses on the layout synthesis of mechanical components, while the full synthesis methodology including automated and optimal electronic control loop synthesis is outlined in Part 2.
1-15
Zhao, Chenxu
87d1aa10-ef41-44bc-8969-82626aa1dd92
Kazmierski, Tom
a97d7958-40c3-413f-924d-84545216092a
Zhao, Chenxu
87d1aa10-ef41-44bc-8969-82626aa1dd92
Kazmierski, Tom
a97d7958-40c3-413f-924d-84545216092a

Zhao, Chenxu and Kazmierski, Tom (2010) A Holistic Approach to Automated Synthesis of Mixed-technology Digital MEMS Sensors Part 1: Layout Synthesis of MEMS Component with Distributed Mechanical Dynamics. Sensors & Transducers, 117, 1-15.

Record type: Article

Abstract

This contribution presents a novel, holistic methodology for automated optimal layout synthesis of MEMS systems embedded in electronic control circuitry from user-defined high-level performance specifications and design constraints. The proposed approach is based on simulation-based optimization where the genetic-based synthesis of both mechanical layouts and associated electronic control loops is coupled with calculations of optimal design parameters. The underlying MEMS models include distributed mechanical dynamics described by partial differential equations to enable accurate performance prediction of critical mechanical components. The proposed genetic-based synthesis technique has been implemented in SystemC-A and named SystemC-AGNES. A practical case study of an automated design of a capacitive MEMS accelerometer with Sigma-Delta control demonstrates the operation of the SystemC-AGNES platform. This Part 1 of the paper focuses on the layout synthesis of mechanical components, while the full synthesis methodology including automated and optimal electronic control loop synthesis is outlined in Part 2.

Full text not available from this repository.

More information

Published date: 25 June 2010
Organisations: EEE

Identifiers

Local EPrints ID: 271342
URI: https://eprints.soton.ac.uk/id/eprint/271342
PURE UUID: e5c4c727-d0fe-47f2-a978-4da677415479

Catalogue record

Date deposited: 05 Jul 2010 10:38
Last modified: 18 Jul 2017 06:44

Export record

Contributors

Author: Chenxu Zhao
Author: Tom Kazmierski

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×