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A Holistic Approach to Automated Synthesis of Mixed-technology Digital MEMS Sensors Part 2: Synthesis of a MEMS System with Associated Control Loop

A Holistic Approach to Automated Synthesis of Mixed-technology Digital MEMS Sensors Part 2: Synthesis of a MEMS System with Associated Control Loop
A Holistic Approach to Automated Synthesis of Mixed-technology Digital MEMS Sensors Part 2: Synthesis of a MEMS System with Associated Control Loop
Part 2 of this paper presents a holistic synthesis approach to designing both the mechanical layout and associated electronic control in a mixed-domain MEMS sensor. It develops further the concepts presented in Part 1 which focuses on layout synthesis of the mechanical part only. A case study is discussed where the proposed genetic-based synthesis approach implemented in SystemC-AGNES is applied to a high order ΣΔ control system in an electromechanical MEMS accelerometer. The method efficiently and in an automated manner generates suitable configurations of the ΣΔ control loop by combining primitive components stored in a library and optimizes them according to user specifications. The synthesis results show that the proposed technique explores the configuration space effectively and it develops new circuit structures which have not been investigated before. The noise floors in the MEMS accelerometers synthesized by SystemC-AGNES are further reduced leading to an improvement of the SNR compared with a manually designed standard electromechanical ΣΔ MEMS accelerometer.
16-28
Zhao, Chenxu
87d1aa10-ef41-44bc-8969-82626aa1dd92
Kazmierski, Tom
a97d7958-40c3-413f-924d-84545216092a
Zhao, Chenxu
87d1aa10-ef41-44bc-8969-82626aa1dd92
Kazmierski, Tom
a97d7958-40c3-413f-924d-84545216092a

Zhao, Chenxu and Kazmierski, Tom (2010) A Holistic Approach to Automated Synthesis of Mixed-technology Digital MEMS Sensors Part 2: Synthesis of a MEMS System with Associated Control Loop. Sensors & Transducers, 117, 16-28.

Record type: Article

Abstract

Part 2 of this paper presents a holistic synthesis approach to designing both the mechanical layout and associated electronic control in a mixed-domain MEMS sensor. It develops further the concepts presented in Part 1 which focuses on layout synthesis of the mechanical part only. A case study is discussed where the proposed genetic-based synthesis approach implemented in SystemC-AGNES is applied to a high order ΣΔ control system in an electromechanical MEMS accelerometer. The method efficiently and in an automated manner generates suitable configurations of the ΣΔ control loop by combining primitive components stored in a library and optimizes them according to user specifications. The synthesis results show that the proposed technique explores the configuration space effectively and it develops new circuit structures which have not been investigated before. The noise floors in the MEMS accelerometers synthesized by SystemC-AGNES are further reduced leading to an improvement of the SNR compared with a manually designed standard electromechanical ΣΔ MEMS accelerometer.

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Published date: June 2010
Organisations: EEE

Identifiers

Local EPrints ID: 271343
URI: https://eprints.soton.ac.uk/id/eprint/271343
PURE UUID: 0c114f1d-63cc-4399-94be-3c98f219a006

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Date deposited: 05 Jul 2010 10:41
Last modified: 09 Jul 2018 16:31

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Contributors

Author: Chenxu Zhao
Author: Tom Kazmierski

University divisions

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