Graphene for Nano-Electro-Mechanical Systems
Graphene for Nano-Electro-Mechanical Systems
We discuss the prospect of graphene as a material for nano-electro-mechanical-systems. A comparison between SOI silicon and graphene fabrication technologies is presented as well new ideas for integrated new electromechanical devices combining novel electronic and mechanical properties of graphene. We also present new results of graphene nanostructuring with the helium ion microscope as an emerging technology for fabrication of electromechanical devices.
Graphene, Helium ion microscope, NEMS, MEMS
Moktadir, Zakaria
34472668-ffda-4287-8fea-2c4f3bf1e2fa
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Rutt, Harvey
e09fa327-0c01-467a-9898-4e7f0cd715fc
Moktadir, Zakaria
34472668-ffda-4287-8fea-2c4f3bf1e2fa
Boden, Stuart
83976b65-e90f-42d1-9a01-fe9cfc571bf8
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Rutt, Harvey
e09fa327-0c01-467a-9898-4e7f0cd715fc
Moktadir, Zakaria, Boden, Stuart, Mizuta, Hiroshi and Rutt, Harvey
(2010)
Graphene for Nano-Electro-Mechanical Systems.
21st Micromechanics and Micro Systems Europe Workshop (MME2010), Enschede, The, Netherlands.
26 - 29 Sep 2010.
(Submitted)
Record type:
Conference or Workshop Item
(Poster)
Abstract
We discuss the prospect of graphene as a material for nano-electro-mechanical-systems. A comparison between SOI silicon and graphene fabrication technologies is presented as well new ideas for integrated new electromechanical devices combining novel electronic and mechanical properties of graphene. We also present new results of graphene nanostructuring with the helium ion microscope as an emerging technology for fabrication of electromechanical devices.
Text
Abstract_MME2010.pdf
- Accepted Manuscript
More information
Submitted date: 12 July 2010
Additional Information:
Event Dates: 26-29 September 2010
Venue - Dates:
21st Micromechanics and Micro Systems Europe Workshop (MME2010), Enschede, The, Netherlands, 2010-09-26 - 2010-09-29
Keywords:
Graphene, Helium ion microscope, NEMS, MEMS
Organisations:
Nanoelectronics and Nanotechnology, Electronics & Computer Science
Identifiers
Local EPrints ID: 271381
URI: http://eprints.soton.ac.uk/id/eprint/271381
PURE UUID: 8f972782-c6f9-4fd0-86a3-8f62a17dc351
Catalogue record
Date deposited: 12 Jul 2010 10:17
Last modified: 15 Mar 2024 03:21
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Contributors
Author:
Zakaria Moktadir
Author:
Stuart Boden
Author:
Hiroshi Mizuta
Author:
Harvey Rutt
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