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Graphene for Nano-Electro-Mechanical Systems

Moktadir, Zakaria, Boden, Stuart, Mizuta, Hiroshi and Rutt, Harvey (2010) Graphene for Nano-Electro-Mechanical Systems At 21st Micromechanics and Micro Systems Europe Workshop (MME2010), Netherlands. 26 - 29 Sep 2010.

Record type: Conference or Workshop Item (Poster)


We discuss the prospect of graphene as a material for nano-electro-mechanical-systems. A comparison between SOI silicon and graphene fabrication technologies is presented as well new ideas for integrated new electromechanical devices combining novel electronic and mechanical proper-ties of graphene. We also present new results of graphene nanostructuring with the helium ion microscope as an emerging technology for fabrica-tion of electromechanical devices.

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Submitted date: 12 July 2010
Additional Information: Event Dates: 26-29 September 2010
Venue - Dates: 21st Micromechanics and Micro Systems Europe Workshop (MME2010), Netherlands, 2010-09-26 - 2010-09-29
Keywords: Graphene, Helium ion microscope, NEMS, MEMS
Organisations: Nanoelectronics and Nanotechnology, Electronics & Computer Science


Local EPrints ID: 271381
PURE UUID: 8f972782-c6f9-4fd0-86a3-8f62a17dc351
ORCID for Stuart Boden: ORCID iD

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Date deposited: 12 Jul 2010 10:17
Last modified: 18 Jul 2017 06:43

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Author: Zakaria Moktadir
Author: Stuart Boden ORCID iD
Author: Hiroshi Mizuta
Author: Harvey Rutt

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