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Scaled Silicon Nanoelectromechanical (NEM) Hybrid Systems

Scaled Silicon Nanoelectromechanical (NEM) Hybrid Systems
Scaled Silicon Nanoelectromechanical (NEM) Hybrid Systems
In this paper we overview recent attempts at co-integrating silicon nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional electronic devices in ‘More-than-Moore’ domain and also explore novel operating principles in ‘Beyond CMOS’ domain.
Mizuta, Hiroshi
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Garcia Ramirez, Mario
6110a5eb-c5bc-4b1c-9cc3-6569e5ae3259
Arab Hassani, Faezeh
489be2da-4cc2-40fd-8c1a-77d7fa7333a2
Ghiass, Mohammad Adel
ddf17d39-621b-44c6-bf39-2fa84e23b492
Kalhor, Nima
510475e4-cb4b-4787-9464-a5768ea5582d
Moktadir, Zakaria
34472668-ffda-4287-8fea-2c4f3bf1e2fa
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Sawai, S
45f45cbf-fcf1-487d-a3b7-ac827b61492b
Ogi, Jun
4e46ba9f-92b9-438c-8b3e-11f9e00f7d3e
Oda, S
514339b3-f8de-4750-8d20-c520834b2477
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Garcia Ramirez, Mario
6110a5eb-c5bc-4b1c-9cc3-6569e5ae3259
Arab Hassani, Faezeh
489be2da-4cc2-40fd-8c1a-77d7fa7333a2
Ghiass, Mohammad Adel
ddf17d39-621b-44c6-bf39-2fa84e23b492
Kalhor, Nima
510475e4-cb4b-4787-9464-a5768ea5582d
Moktadir, Zakaria
34472668-ffda-4287-8fea-2c4f3bf1e2fa
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Sawai, S
45f45cbf-fcf1-487d-a3b7-ac827b61492b
Ogi, Jun
4e46ba9f-92b9-438c-8b3e-11f9e00f7d3e
Oda, S
514339b3-f8de-4750-8d20-c520834b2477

Mizuta, Hiroshi, Garcia Ramirez, Mario, Arab Hassani, Faezeh, Ghiass, Mohammad Adel, Kalhor, Nima, Moktadir, Zakaria, Tsuchiya, Yoshishige, Sawai, S, Ogi, Jun and Oda, S (2010) Scaled Silicon Nanoelectromechanical (NEM) Hybrid Systems. International Conference on Solid-State and Integrated Circuit Technology (Invited Talk), China. 01 - 04 Nov 2010.

Record type: Conference or Workshop Item (Other)

Abstract

In this paper we overview recent attempts at co-integrating silicon nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional electronic devices in ‘More-than-Moore’ domain and also explore novel operating principles in ‘Beyond CMOS’ domain.

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More information

Accepted/In Press date: 1 November 2010
Additional Information: Event Dates: Nov. 1- 4
Venue - Dates: International Conference on Solid-State and Integrated Circuit Technology (Invited Talk), China, 2010-11-01 - 2010-11-04
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 271634
URI: http://eprints.soton.ac.uk/id/eprint/271634
PURE UUID: 50960a3e-220f-4f1f-9383-3e5b48733454

Catalogue record

Date deposited: 18 Oct 2010 12:39
Last modified: 18 Jul 2017 06:40

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