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High-resistivity Czochralski-silicon using Deep Level Doping Compensation

High-resistivity Czochralski-silicon using Deep Level Doping Compensation
High-resistivity Czochralski-silicon using Deep Level Doping Compensation
We report a combination of experimental, analytical, and numerical results indicating that deep level doping of Czochralski grown Si wafers is capable of providing very high resistivity handle wafers for the silicon-on-insulator configuration. This would be extremely beneficial for high frequency applications.
Abuelgasim, Ahmed
574b647b-e495-42cb-8ed8-952589d79ba3
Mallik, Kanad
013bdafd-6ae0-463e-89a4-6ef1301c5c2f
de Groot, Kees
92cd2e02-fcc4-43da-8816-c86f966be90c
Ashburn, Peter
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Jordan, D.M.
5cef75d2-c7d2-496a-ae7d-5f66ad196c7b
Wilshaw, P.R.
d2e7bcf3-ea4b-441a-8395-009e4ac8cb65
Abuelgasim, Ahmed
574b647b-e495-42cb-8ed8-952589d79ba3
Mallik, Kanad
013bdafd-6ae0-463e-89a4-6ef1301c5c2f
de Groot, Kees
92cd2e02-fcc4-43da-8816-c86f966be90c
Ashburn, Peter
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Jordan, D.M.
5cef75d2-c7d2-496a-ae7d-5f66ad196c7b
Wilshaw, P.R.
d2e7bcf3-ea4b-441a-8395-009e4ac8cb65

Abuelgasim, Ahmed, Mallik, Kanad, de Groot, Kees, Ashburn, Peter, Jordan, D.M. and Wilshaw, P.R. (2010) High-resistivity Czochralski-silicon using Deep Level Doping Compensation. ESSDERC 2010, Spain. (In Press)

Record type: Conference or Workshop Item (Poster)

Abstract

We report a combination of experimental, analytical, and numerical results indicating that deep level doping of Czochralski grown Si wafers is capable of providing very high resistivity handle wafers for the silicon-on-insulator configuration. This would be extremely beneficial for high frequency applications.

Full text not available from this repository.

More information

Accepted/In Press date: September 2010
Additional Information: Event Dates: September 2010
Venue - Dates: ESSDERC 2010, Spain, 2010-09-01
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 271786
URI: https://eprints.soton.ac.uk/id/eprint/271786
PURE UUID: 54e079b0-94e6-4d2f-aac4-2c23c17b5b39
ORCID for Kees de Groot: ORCID iD orcid.org/0000-0002-3850-7101

Catalogue record

Date deposited: 15 Dec 2010 11:11
Last modified: 06 Jun 2018 12:50

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