Kukharenka, E. and Kraft, M. (2002) Realisation of electroplating moulds with different thick photoresists for MEMS applications. Eurosensors XIV Conference, Prague, Czech Republic. 14 - 17 Sep 2002. pp. 95-98 .
Record type:
Conference or Workshop Item
(Poster)
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Published date: 6 September 2002
Additional Information:
Event Dates: September 15-18
Venue - Dates:
Eurosensors XIV Conference, Prague, Czech Republic, 2002-09-14 - 2002-09-17
Organisations:
Nanoelectronics and Nanotechnology, EEE
Identifiers
Local EPrints ID: 271826
URI: http://eprints.soton.ac.uk/id/eprint/271826
PURE UUID: 149a1b20-0df6-4778-bcca-bac0ea74253b
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Date deposited: 22 Dec 2010 11:24
Last modified: 10 Dec 2021 23:27
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Contributors
Author:
E. Kukharenka
Author:
M. Kraft
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