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Realisation of electroplating moulds with different thick photoresists for MEMS applications

Kukharenka, E. and Kraft, M. (2002) Realisation of electroplating moulds with different thick photoresists for MEMS applications At Eurosensors XIV Conference, Czech Republic. 15 - 18 Sep 2002. , pp. 95-98.

Record type: Conference or Workshop Item (Poster)

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More information

Published date: 6 September 2002
Additional Information: Event Dates: September 15-18
Venue - Dates: Eurosensors XIV Conference, Czech Republic, 2002-09-15 - 2002-09-18
Organisations: Nanoelectronics and Nanotechnology, EEE

Identifiers

Local EPrints ID: 271826
URI: http://eprints.soton.ac.uk/id/eprint/271826
PURE UUID: 149a1b20-0df6-4778-bcca-bac0ea74253b

Catalogue record

Date deposited: 22 Dec 2010 11:24
Last modified: 18 Jul 2017 06:38

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Contributors

Author: E. Kukharenka
Author: M. Kraft

University divisions

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