Realisation of electroplating moulds with different thick photoresists for MEMS applications


Kukharenka, E. and Kraft, M. (2002) Realisation of electroplating moulds with different thick photoresists for MEMS applications At Eurosensors XIV Conference, Czech Republic. 15 - 18 Sep 2002. , pp. 95-98.

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Item Type: Conference or Workshop Item (Poster)
Additional Information: Event Dates: September 15-18
Venue - Dates: Eurosensors XIV Conference, Czech Republic, 2002-09-15 - 2002-09-18
Organisations: Nanoelectronics and Nanotechnology, EEE
ePrint ID: 271826
Date :
Date Event
6 September 2002Published
Date Deposited: 22 Dec 2010 11:24
Last Modified: 17 Apr 2017 18:06
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/271826

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