Realisation of electroplating moulds with different thick photoresists for MEMS applications
Realisation of electroplating moulds with different thick photoresists for MEMS applications
95-98
Kukharenka, E.
b34ae878-2776-4088-8880-5b2bd4f33ec3
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
6 September 2002
Kukharenka, E.
b34ae878-2776-4088-8880-5b2bd4f33ec3
Kraft, M.
54927621-738f-4d40-af56-a027f686b59f
Kukharenka, E. and Kraft, M.
(2002)
Realisation of electroplating moulds with different thick photoresists for MEMS applications.
Eurosensors XIV Conference, Prague, Czech Republic.
14 - 17 Sep 2002.
.
Record type:
Conference or Workshop Item
(Poster)
This record has no associated files available for download.
More information
Published date: 6 September 2002
Additional Information:
Event Dates: September 15-18
Venue - Dates:
Eurosensors XIV Conference, Prague, Czech Republic, 2002-09-14 - 2002-09-17
Organisations:
Nanoelectronics and Nanotechnology, EEE
Identifiers
Local EPrints ID: 271826
URI: http://eprints.soton.ac.uk/id/eprint/271826
PURE UUID: 149a1b20-0df6-4778-bcca-bac0ea74253b
Catalogue record
Date deposited: 22 Dec 2010 11:24
Last modified: 10 Dec 2021 23:27
Export record
Contributors
Author:
E. Kukharenka
Author:
M. Kraft
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics